Electron beam range effects in SEM/EDX: Application to scratch-testing of coated carbides
The use of protective coatings to enhance the chemical and mechanical properties of materials is widely practiced in industry. For example, in cutting tool technology, the use of strongly adhering, specialized coatings has expanded the lifetime and performance of cutting tools. The most widely used technique for checking coating adherence is the scratch-test. Investigation of the scratch regions by SEM via both electron and x-ray imaging may assist in the determination of the failure mode region, i.e., within the coating, at an interface, or within the substrate.As an example of this approach, a cemented carbide was coated first with TiC (6 μm) and then with Al2O3 (2 μm). A scratch-test was carried out and the sample was analyzed using the JEOL JSM-840 analytical SEM at an electron beam energy of 20 keV. All secondary electron (grayscale) and x-ray images (256x256x8 pixel resolution) were taken using digital imaging hardware on a Tracor Northern TN-5500 system.