High resolution Scanning Electron Microscopy

Author(s):  
David C. Joy

High resolution scanning electron microscopy is still a relatively new and unfamiliar concept because in the early days of the SEM it was expected, that secondary electron imaging would be limited to a resolution of between 5 and 10nm at best. Now, however, because of improvements in instrumentation and technique based on advances in the understanding of electron beam interactions with solids current SEMs can demonstrate spatial resolutions below 1nm, rivaling those obtained by transmission instruments.High performance scanning electron microscopes always incorporate two advanced items of instrumentation. Firstly they use field emission guns (FEGs). The high brightness, low energy spread, and small source size of the FEG makes it possible to produce an electron probe of sub-nanometer size which contains sufficient current for secondary electron imaging (i.e 10-12 amps or more) and which can maintain this performance over a wide energy range (3 to 30keV). Secondly, the new high performance instruments place the specimen within a high excitation, immersion, probe forming lens.

2012 ◽  
pp. 2280-2280
Author(s):  
Yimei Zhu ◽  
Hiromi Inada ◽  
Achim Hartschuh ◽  
Li Shi ◽  
Ada Della Pia ◽  
...  

Author(s):  
Klaus-Ruediger Peters

In scanning electron microscopy on bulk untilted specimens topographic resolution in conventional “secondary electron imaging” (SEI) mode is very low; only in the order of several beam diameters. Extensive electron scattering within the specimen was thought to limit resolution since secondary electrons (SE) are collected irrespectively of their origin.


Author(s):  
Klaus-Ruediger Peters

High gas pressure scanning electron microscopy is now routinely possible with new microscopes operating between 0.1 and 20 torr gas pressure. Since the specimen chamber is separated from the electron optical column by pressure-limiting apertures, high gas pressures present at the level of the specimen do not affect the high vacuum in the column. The use of a single PLA underneath the last probe-forming lens allows maintainance of ∼0.1 torr. Twenty torr can be stabilized with two PLA, forming two differentially pumped pressure zones which may be incorporated into the last probe-forming lens.One of the most important new features of high gas pressure microscopy is the possibility to alter the type of gas and its pressure over a large range. High gas pressures (>1 torr) are required for charge neutralization on rugged insulators and for gas amplification of the SE signal. Additionally, using water vapors, liquid water can be stabilized. However, the aqueous environment is only one example among many possibilities.The secondary electron imaging of liquid water is a fascinating new aspect of scanning electron microscopy. At saturated water vapor pressures, water is stable indefinitely. Increasing or decreasing the vapor pressure allows condensation or evaporation of water and provides means to generate water films. As can be seer from Fig. 1, the stabilizing pressure for water at 20°C is 17.5 torr. Such a pressure would require a very short working distance for SE imaing. Therefore, it is preferable to reduce the specimen temperature and to establish vapor saturation at lower pressures. However, liquid water can only be stabilized at pressures greater than ∼4.5 torr.


Author(s):  
Nakazo Watari ◽  
Yasuaki Hotta ◽  
Yoshio Mabuchi

It is very useful if we can observe the identical cell elements within the same sections by light microscopy (LM), transmission electron microscopy (TEM) and/or scanning electron microscopy (SEM) sequentially, because, the cell fine structure can not be indicated by LM, while the color is; on the other hand, the cell fine structure can be very easily observed by EM, although its color properties may not. However, there is one problem in that LM requires thick sections of over 1 μm, while EM needs very thin sections of under 100 nm. Recently, we have developed a new method to observe the same cell elements within the same plastic sections using both light and transmission (conventional or high-voltage) electron microscopes.In this paper, we have developed two new observation methods for the identical cell elements within the same sections, both plastic-embedded and paraffin-embedded, using light microscopy, transmission electron microscopy and/or scanning electron microscopy (Fig. 1).


Author(s):  
P. A. Madden ◽  
W. R. Anderson

The intestinal roundworm of swine is pinkish in color and about the diameter of a lead pencil. Adult worms, taken from parasitized swine, frequently were observed with macroscopic lesions on their cuticule. Those possessing such lesions were rinsed in distilled water, and cylindrical segments of the affected areas were removed. Some of the segments were fixed in buffered formalin before freeze-drying; others were freeze-dried immediately. Initially, specimens were quenched in liquid freon followed by immersion in liquid nitrogen. They were then placed in ampuoles in a freezer at −45C and sublimated by vacuum until dry. After the specimens appeared dry, the freezer was allowed to come to room temperature slowly while the vacuum was maintained. The dried specimens were attached to metal pegs with conductive silver paint and placed in a vacuum evaporator on a rotating tilting stage. They were then coated by evaporating an alloy of 20% palladium and 80% gold to a thickness of approximately 300 A°. The specimens were examined by secondary electron emmission in a scanning electron microscope.


Author(s):  
D. Johnson ◽  
P. Moriearty

Since several species of Schistosoma, or blood fluke, parasitize man, these trematodes have been subjected to extensive study. Light microscopy and conventional electron microscopy have yielded much information about the morphology of the various stages; however, scanning electron microscopy has been little utilized for this purpose. As the figures demonstrate, scanning microscopy is particularly helpful in studying at high resolution characteristics of surface structure, which are important in determining host-parasite relationships.


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