Use of Polycapillary Optics to Increase the Effective Area of Microcalorimeter Spectrometers

1997 ◽  
Vol 3 (S2) ◽  
pp. 1075-1076 ◽  
Author(s):  
D. A. Wollman ◽  
Christopher Jezewski ◽  
G. C. Hilton ◽  
Qi-Fan Xiao ◽  
K. D. Irwin ◽  
...  

Although the performance of high-energy-resolution microcalorimeter spectrometers for x-ray microanalysis is encouraging, the future widespread acceptance of these spectrometers as valuable microanalysis instruments depends on improvements in both achievable count rate and geometrical x-ray collection efficiency. While the maximum output count rate of our microcalorimeter (∼160 s−1) is much less than that of conventional EDS detectors operating at their highest energy resolution (∼3000 s−1), we are confident that we can significantly improve the count rate without loss of energy resolution (∼10 eV FWHM over a broad energy range). Increasing the area (and thus solid angle) of the microcalorimeter is a more difficult problem, however, as the best microcalorimeter performance is achieved using small-area (typically 250 μm by 250 μm) absorbers with low heat capacity.This problem can be solved by using an x-ray lens to increase the collection efficiency of the microcalorimeter spectrometer. A polycapillary optic consisting of tens of thousands of fused capillaries can collect x-rays from a point x-ray source over a large solid angle and focus the x-rays onto the small-area absorber of the microcalorimeter.

2013 ◽  
Vol 19 (S2) ◽  
pp. 1258-1259 ◽  
Author(s):  
H. Takahashi ◽  
N. Handa ◽  
T. Murano ◽  
M. Terauchi ◽  
M. Koike ◽  
...  

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.


1998 ◽  
Vol 188 ◽  
pp. 335-336
Author(s):  
N. Y. Yamasaki ◽  
T. Ohashi ◽  
K. Kikuchi ◽  
H. Miyazaki ◽  
E. Rokutanda ◽  
...  

STJs are promising X-ray detectors as high energy resolution spectrometers due to the small excitation energy to break the Cooper pairs to product detectable electrons. The expected energy resolution is about 5 eV for a 6 keV incident X-rays (see review by Kraus et al. and Esposito et al.). We have developed a large area (178 × 178μm2) Nb/Al/AlOX/Al/Nb STJs (Kurakado et al. 1993) and series-connected STJs with a position resolution of 35μm for α particles (Kurakado 1997) at Nippon Steel Corporation. As a focal plane detector in future X-ray missions, we are developing STJs whose targert characteristics are; an energy resolution of 20 eV at 6keV, an effective area of 1 cm2, and position resolution of 100μm.


1993 ◽  
Vol 37 ◽  
pp. 405-411
Author(s):  
C. S. Rossington ◽  
N. W. Madden ◽  
K. Chapman

AbstractA new x-ray spectrometer has been constructed which incorporates a novel large area, low capacitance Si(Li) detector and a low noise JFET (junction field effect transistor) preamplifier. The spectrometer operates at high count Tates without the conventional compromise in energy resolution. For example, at an amplifier peaking time of 1 p.sec and a throughput count rate of 145,000 counts sec-1, the energy resolution at 5.9 keV is 220 eV FWHM. Commercially available spectrometers utilizing conventional geometry Si(Li) detectors with areas equivalent to the new detector have resolutions on the order of 540 eV under the same conditions. Conventional x-ray spectrometers offering high energy resolution must employ detectors with areas one-tenth the size of the new LBL detector (20 mm2 compared with 200 mm2). However, even with the use of the smaller area detectors, the energy resolution of a commercial system is typically limited to approximately 300 eV (again, at 1 μsec and 5.9 keV) due to the noise of the commercially available JFET's. The new large area detector is useful in high count rate applications, but is also useful in the detection of weak photon signals, in which it is desirable to subtend as large an angle of the available photon flux as possible, while still maintaining excellent energy resolution. X-ray fluorescence data from die new spectrometer is shown in comparison to a commercially available system in the analysis of a dilute muhi-element material, and also in conjunction with high count rate synchrotron EXAFS applications.


2012 ◽  
Vol 20 (4) ◽  
pp. 38-42 ◽  
Author(s):  
Robin Cantor ◽  
Hideo Naito

X-ray spectroscopy is a widely used and extremely sensitive analytical technique for qualitative as well as quantitative elemental analysis. Typically, high-energy-resolution X-ray spectrometers are integrated with a high-spatial-resolution scanning electron microscope (SEM) or transmission electron microscope (TEM) for X-ray microanalysis applications. The focused electron beam of the SEM or TEM excites characteristic X rays that are emitted by the sample. The integrated X-ray spectrometer can then be used to identify and quantify the elemental composition of the sample on a sub-micron length scale. This combination of energy resolution and spatial resolution makes X-ray microanalysis of great importance to the semiconductor industry.


2009 ◽  
Vol 42 (4) ◽  
pp. 572-579 ◽  
Author(s):  
Herbert Legall ◽  
Holger Stiel ◽  
Matthias Schnürer ◽  
Marcel Pagels ◽  
Birgit Kanngießer ◽  
...  

X-ray optics with high energy resolution and collection efficiency are required in X-ray spectroscopy for investigations of chemistry and coordination. This is particularly the case if the X-ray source emits a rather weak signal into a large solid angle. In the present work the performance of a spectrometer based on thin mosaic crystals was investigated for different spectroscopic methods using various X-ray sources. It was found that, even with low-power X-ray sources, advanced high-resolution X-ray spectroscopy can be performed.


Author(s):  
J. R. Michael

X-ray microanalysis in the analytical electron microscope (AEM) refers to a technique by which chemical composition can be determined on spatial scales of less than 10 nm. There are many factors that influence the quality of x-ray microanalysis. The minimum probe size with sufficient current for microanalysis that can be generated determines the ultimate spatial resolution of each individual microanalysis. However, it is also necessary to collect efficiently the x-rays generated. Modern high brightness field emission gun equipped AEMs can now generate probes that are less than 1 nm in diameter with high probe currents. Improving the x-ray collection solid angle of the solid state energy dispersive spectrometer (EDS) results in more efficient collection of x-ray generated by the interaction of the electron probe with the specimen, thus reducing the minimum detectability limit. The combination of decreased interaction volume due to smaller electron probe size and the increased collection efficiency due to larger solid angle of x-ray collection should enhance our ability to study interfacial segregation.


2001 ◽  
Vol 7 (S2) ◽  
pp. 1050-1051 ◽  
Author(s):  
S.W. Nam ◽  
D.A. Wollman ◽  
Dale E. Newbury ◽  
G.C. Hilton ◽  
K.D. Irwin ◽  
...  

The high performance of single-pixel microcalorimeter EDS (μ,cal EDS) has been shown to be very useful for a variety of microanalysis cases. The primary advantage of jxcal EDS over conventional EDS is the factor of 25 improvement in energy resolution (∽3 eV in real-time). This level of energy resolution is particularly important for applications such as nanoscale contaminant analysis where it is necessary to resolve peak overlaps at low x-ray energies. Because μcal EDS offers practical solutions to many microanalysis problems, several companies are proceeding with commercialization of single-pixel μal EDS technology. Two drawbacks limiting the application of uxal EDS are its low count rate (∽500 s−1) and small area (∽0.04 mm for a bare single pixel, ∽5 mm2 with a polycapillary optic). We are developing a 32x32 pixel array with a total area of 40 mm2 and with a total count rate between 105 s−1 and 106 s−1.


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