Development of a Cathodoluminescence Detection System for the (S)TEM Demonstrating Sub-nm Spatial and Sub-meV Spectral Resolution

AbstractNew observations of x-ray spectra from foil-excited heavy ion beams are reported. By observing the target in a direction along the beam axis, an improvement in spectral resolution, δλ/λ, by about a factor of two is achieved, due to the reduced Doppler broadening in this geometry.

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Analysis of electron-diffraction intensity profiles using a photodiode-array detection system

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100075403 ◽

1983 ◽

Vol 41 ◽

pp. 322-323

Author(s):

J. B. Warren

Keyword(s):

Electron Diffraction ◽

Diffraction Pattern ◽

Detection System ◽

High Energy ◽

Photographic Emulsion ◽

Diffraction Intensity ◽

Silicon Photodiode ◽

Photodiode Array Detection ◽

Analog To Digital ◽

Photodiode Array

Electron diffraction intensity profiles have been used extensively in studies of polycrystalline and amorphous thin films. In previous work, diffraction intensity profiles were quantitized either by mechanically scanning the photographic emulsion with a densitometer or by using deflection coils to scan the diffraction pattern over a stationary detector. Such methods tend to be slow, and the intensities must still be converted from analog to digital form for quantitative analysis. The Instrumentation Division at Brookhaven has designed and constructed a electron diffractometer, based on a silicon photodiode array, that overcomes these disadvantages. The instrument is compact (Fig. 1), can be used with any unmodified electron microscope, and acquires the data in a form immediately accessible by microcomputer.Major components include a RETICON 1024 element photodiode array for the de tector, an Analog Devices MAS-1202 analog digital converter and a Digital Equipment LSI 11/2 microcomputer. The photodiode array cannot detect high energy electrons without damage so an f/1.4 lens is used to focus the phosphor screen image of the diffraction pattern on to the photodiode array.

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Data Acquisition and Handling Unit for a Quantitative Use of Electron Energy Loss Spectroscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100078699 ◽

1977 ◽

Vol 35 ◽

pp. 232-233 ◽

Cited By ~ 1

Author(s):

P. Trebbia ◽

P. Ballongue ◽

C. Colliex

Keyword(s):

Electron Microscope ◽

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Single Channel ◽

Detection System ◽

Surface Barrier ◽

Solid State Detector ◽

Electrostatic Mirror ◽

Electron Energy Loss

An effective use of electron energy loss spectroscopy for chemical characterization of selected areas in the electron microscope can only be achieved with the development of quantitative measurements capabilities.The experimental assembly, which is sketched in Fig.l, has therefore been carried out. It comprises four main elements.The analytical transmission electron microscope is a conventional microscope fitted with a Castaing and Henry dispersive unit (magnetic prism and electrostatic mirror). Recent modifications include the improvement of the vacuum in the specimen chamber (below 10-6 torr) and the adaptation of a new electrostatic mirror.The detection system, similar to the one described by Hermann et al (1), is located in a separate chamber below the fluorescent screen which visualizes the energy loss spectrum. Variable apertures select the electrons, which have lost an energy AE within an energy window smaller than 1 eV, in front of a surface barrier solid state detector RTC BPY 52 100 S.Q. The saw tooth signal delivered by a charge sensitive preamplifier (decay time of 5.10-5 S) is amplified, shaped into a gaussian profile through an active filter and counted by a single channel analyser.

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Angular Resolved Electron Spectroscopy with Parallel Recording

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100135459 ◽

1990 ◽

Vol 48 (2) ◽

pp. 370-371

Author(s):

Huang Min ◽

P.S. Flora ◽

C.J. Harland ◽

J.A. Venables

Keyword(s):

Electron Spectroscopy ◽

Low Voltage ◽

Solid Angle ◽

Detection System ◽

Voltage Electron ◽

Cylindrical Mirror ◽

Inner Radius ◽

Channel Plate ◽

And Performance ◽

Type Detector

A cylindrical mirror analyser (CMA) has been built with a parallel recording detection system. It is being used for angular resolved electron spectroscopy (ARES) within a SEM. The CMA has been optimised for imaging applications; the inner cylinder contains a magnetically focused and scanned, 30kV, SEM electron-optical column. The CMA has a large inner radius (50.8mm) and a large collection solid angle (Ω > 1sterad). An energy resolution (ΔE/E) of 1-2% has been achieved. The design and performance of the combination SEM/CMA instrument has been described previously and the CMA and detector system has been used for low voltage electron spectroscopy. Here we discuss the use of the CMA for ARES and present some preliminary results.The CMA has been designed for an axis-to-ring focus and uses an annular type detector. This detector consists of a channel-plate/YAG/mirror assembly which is optically coupled to either a photomultiplier for spectroscopy or a TV camera for parallel detection.

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Quantitative EPMA of nitrogen : A tricky element in the electron-probe microanalyzer

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100132741 ◽

1992 ◽

Vol 50 (2) ◽

pp. 1622-1623

Author(s):

G.F. Bastin ◽

H.J.M. Heijligers

Keyword(s):

Background Subtraction ◽

Electron Probe ◽

Detection System ◽

Higher Order ◽

Light Elements ◽

Strong Suppression ◽

Electron Probe Microanalyzer ◽

Quantitative Epma ◽

Peak Count ◽

Lead Stearate

Among the ultra-light elements B, C, N, and O nitrogen is the most difficult element to deal with in the electron probe microanalyzer. This is mainly caused by the severe absorption that N-Kα radiation suffers in carbon which is abundantly present in the detection system (lead-stearate crystal, carbonaceous counter window). As a result the peak-to-background ratios for N-Kα measured with a conventional lead-stearate crystal can attain values well below unity in many binary nitrides . An additional complication can be caused by the presence of interfering higher-order reflections from the metal partner in the nitride specimen; notorious examples are elements such as Zr and Nb. In nitrides containing these elements is is virtually impossible to carry out an accurate background subtraction which becomes increasingly important with lower and lower peak-to-background ratios. The use of a synthetic multilayer crystal such as W/Si (2d-spacing 59.8 Å) can bring significant improvements in terms of both higher peak count rates as well as a strong suppression of higher-order reflections.

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