Theory and New Applications ofEx SituLift Out

2015 ◽  
Vol 21 (4) ◽  
pp. 1034-1048 ◽  
Author(s):  
Lucille A. Giannuzzi ◽  
Zhiyang Yu ◽  
Denise Yin ◽  
Martin P. Harmer ◽  
Qiang Xu ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Focused Ion Beam ◽  
Microelectromechanical Systems ◽  
Ion Beam ◽  
Ex Situ ◽  
Adhesion Forces ◽  
Grid Design ◽  
Electron Microscope Analysis ◽  
New Applications

AbstractTheex situlift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed forin situelectron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.

Locally Condensed Water as a Solution for In Situ Wet Corrosion Electron Microscopy

2020 ◽  
Vol 26 (2) ◽  
pp. 211-219
Author(s):  
Majid Ahmadi ◽  
Frans D. Tichelaar ◽  
Andreas Ihring ◽  
Michael Kunze ◽  
Sophie Billat ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Water Layer ◽  
Ex Situ ◽  
Peltier Element ◽  
Tem Analysis ◽  
Dual Beam ◽  
Corrosion Studies

AbstractIn microstructural corrosion studies, knowledge on the initiation of corrosion on an nm-scale is lacking. In situ transmission electron microscope (TEM) studies can elucidate where/how the corrosion starts, provided that the proper corrosive conditions are present during the investigation. In wet corrosion studies with liquid cell nanoreactors (NRs), the liquid along the electron beam direction leads to strong scattering and therefore image blurring. Thus, a quick liquid removal or thickness control of the liquid layer is preferred. This can be done by the use of a Peltier element embedded in an NR. As a prelude to such in situ work, we demonstrate the local wetting of a TEM sample, by creating a temperature decrease of 10 ± 2°C on the membrane of an NR with planar Sb/BiSb thermoelectric materials for the Peltier element. TEM samples were prepared and loaded in an NR using a dual-beam focused ion beam scanning electron microscope. A mixture of water vapor and carrier gas was passed through a chamber, which holds the micro-electromechanical system Peltier device and resulted in quick formation of a water layer/droplets on the sample. The TEM analysis after repeated corrosion of the same sample (ex situ studies) shows the onset and progression of O2 and H2S corrosion of the AA2024-T3 alloy and cold-rolled HCT980X steel lamellae.

scholarly journals Computer-Controlled Polishing System For Preparing Multiple Pre-FIB TEM Specimens

2007 ◽  
Vol 15 (6) ◽  
pp. 38-39
Author(s):  
D. J. MacMahon ◽  
E. Raz-Moyal
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Product Yield ◽  
Interface Layer ◽  
Ex Situ ◽  
Advantages And Disadvantages ◽  
Transmission Electron ◽  
Invaluable Tool ◽  
Electron Microscopes

Semiconductor manufacturers are increasingly turning to Transmission Electron Microscopes (TEMs) to monitor product yield and process control, analyze defects, and investigate interface layer morphology. To prepare TEM specimens, Focused Ion Beam (FIB) technology is an invaluable tool, yielding a standard milled TEM lamella approximately 15 μm wide, 5 μm deep and ~100 nm thick. Several techniques have been developed to extract these tiny objects from a large wafer and view it in the TEM. These techniques, including ex-situ lift-out, H-bar, and in-situ lift-out, have different advantages and disadvantages, but all require painstaking preparation of one specimen at a time.

3D-Printed Samples For EXLO/INLO Practice and Training

2019 ◽  
Author(s):  
Zachary A. Giannuzzi ◽  
Lucille A. Giannuzzi ◽  
Kathleen A. Gehoski ◽  
William J. Mahoney
Keyword(s):  
3D Printing ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Deliberate Practice ◽  
Cost Effective ◽  
Ex Situ ◽  
Training Samples ◽  
3D Printed ◽  
And Training

Abstract Practice and training samples have been manufactured using 3D-printing methods. These 3D-printed samples mimic the exact geometry of focused ion beam (FIB) prepared specimens and can be used to help master ex situ and in situ lift out micromanipulation methods. An additively manufactured array of samples yields numerous samples needed for repetition and deliberate practice necessary to master the lift out and micromanipulation steps. The 3D-printed samples are cost effective and negates expensive FIB time needed to prepare FIB specimens.

Multiple-Post In-Situ Lift-Out Grids Preparation Using a Dicing Saw

2011 ◽  
Author(s):  
Jian-Shing Luo ◽  
Hsiu-Ting Lee ◽  
San-Lin Liew ◽  
Ching-Shan Sung ◽  
Yi-Jing Wu
Keyword(s):  
Sample Preparation ◽  
Focused Ion Beam ◽  
Flat Surface ◽  
Ion Beam ◽  
Ex Situ ◽  
Real Case ◽  
Case Application ◽  
Bond Pads ◽  
Preparation Techniques

Abstract The use of in-situ lift-out combined with focused ion beam milling has become a favorable choice as it offers several indispensable advantages compared to the conventional mechanical and ex-situ lift-out sample preparation techniques. This paper discusses the procedures of the multiple-post in-situ lift-out grids preparation using a dicing saw. In addition, a real case is described to show that the multiple-post in-situ lift-out grids have been successfully applied to failure analysis. The multiple-post in-situ lift-out grids provide more positions and flatter surfaces for TEM sample mounting. The flat surface greatly increases the mounting efficiency and success rate. For the real case application, a thick Al fluoride oxide layer and Al corrosion were found above the Al bond pads, which had NOSP problem, and their neighbor area, respectively.

Convenient Preparation of High-Quality Specimens for Annealing Experiments in the Transmission Electron Microscope

2014 ◽  
Vol 20 (6) ◽  
pp. 1638-1645 ◽  
Author(s):  
Martial Duchamp ◽  
Qiang Xu ◽  
Rafal E Dunin-Borkowski
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Back Side ◽  
High Quality ◽  
Side Milling ◽  
Transmission Electron ◽  
Annealing Experiments

AbstractA procedure based on focused ion beam milling and in situ lift-out is introduced for the preparation of high-quality specimens for in situ annealing experiments in the transmission electron microscope. The procedure allows an electron-transparent lamella to be cleaned directly on a heating chip using a low ion energy and back-side milling in order to minimize redeposition and damage. The approach is illustrated through the preparation of an Al–Mn–Fe complex metallic alloy specimen.

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