Latest Developments in Environmental SEM Systems

The advent of the environmental SEM (ESEM) has made possible the examination of uncoated and untreated specimen surfaces in the presence of a gaseous or liquid environment. However, the question arises as to what degree the examined surface remains unaffected by the action of the electron beam. It is reasonable to assume that the beam invariably affects all specimens but the type and degree of effect may be totally unimportant for one class of applications and totally unacceptable for another; yet, for a third class, it is imperative to know how our observations are modified by the presence of the beam. The aim of this report is to create an awareness of the need to initiate research work in various fields in order to determine the guiding rules of the limitations (or even advantages) due to irradiation.

Download Full-text

Improvements on the gaseous detector device

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100144590 ◽

1986 ◽

Vol 44 ◽

pp. 630-631 ◽

Cited By ~ 1

Author(s):

G.D. Danilatos

Keyword(s):

Gaseous Medium ◽

The Other ◽

Beam Specimen ◽

Thin Wires ◽

Interference Noise ◽

Backscattered Electron ◽

Detection Of Signals ◽

Environmental Sem

The possibility of placing the specimen in a gaseous medium in the environmental SEM (ESEM) has created novel ways for detection of signals from the beam-specimen interactions. It was originally reported by Oanilatos that the ionization produced by certain signals inside the conditioning medium can be used to produce images. The aim of this report is to demonstrate some of the improvements on the system that have occurred thereafter.Two straight thin wires are aligned horizontally along a direction normal to the direction of the two scintillator backscattered electron (BSE) detectors reported elsewhere. The free end tips of the wires are about 5 mm apart halfway between the specimen and the pressure limiting aperture (specimen distance = 1.5 mm). The other end of each wire makes contact with the input of a separate preamplifier, two of which are built inside a shielding aluminum stub. With such a design, interference noise from the input cables is avoided.

Download Full-text

Detector strategies for environmental scanning electron microscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100131115 ◽

1992 ◽

Vol 50 (2) ◽

pp. 1296-1297

Author(s):

Klaus-Ruediger Peters

Keyword(s):

High Vacuum ◽

Environmental Scanning Electron Microscopy ◽

Charge Carriers ◽

Environmental Scanning ◽

Surface Information ◽

X Ray ◽

Detector Electrode ◽

Electrons And Ions ◽

Low Energy Electrons ◽

Environmental Sem

Environmental SEM operate at specimen chamber pressures of ∼20 torr (2.7 kPa) allowing stabilization of liquid water at room temperature, working on rugged insulators, and generation of an environmental secondary electron (ESE) signal. All signals available in conventional high vacuum instruments are also utilized in the environmental SEM, including BSE, SE, absorbed current, CL, and X-ray. In addition, the ESEM allows utilization of the flux of charge carriers as information, providing exciting new signal modes not available to BSE imaging or to conventional high vacuum SEM.In the ESEM, at low vacuum, SE electrons are collected with a “gaseous detector”. This detector collects low energy electrons (and ions) with biased wires or plates similar to those used in early high vacuum SEM for SE detection. The detector electrode can be integrated into the first PLA or positioned at any other place resulting in a versatile system that provides a variety of surface information.

Download Full-text

Effects of Space Charge on ESEM Gas Amplification

Microscopy and Microanalysis ◽

10.1017/s1431927600009934 ◽

1997 ◽

Vol 3 (S2) ◽

pp. 609-610 ◽

Cited By ~ 1

Author(s):

B.L. Thiel ◽

M.R. Hussein-Ismail ◽

A.M. Donald

Keyword(s):

Electric Field ◽

Electrostatic Field ◽

Secondary Electron ◽

Sample Surface ◽

Cascade Process ◽

Secondary Electrons ◽

Positive Ions ◽

Space Charges ◽

Cascade Amplification ◽

Environmental Sem

We have performed a theoretical investigation of the effects of space charges in the Environmental SEM (ESEM). The ElectroScan ESEM uses an electrostatic field to cause gas cascade amplification of secondary electron signals. Previous theoretical descriptions of the gas cascade process in the ESEM have assumed that distortion of the electric field due to space charges can be neglected. This assumption has now been tested and shown to be valid.In the ElectroScan ESEM, a positively biased detector is located above the sample, creating an electric field on the order of 105 V/m between the detector and sample surface. Secondary electrons leaving the sample are cascaded though the gas, amplifying the signal and creating positive ions. Because the electrons move very quickly through the gas, they do not accumulate in the specimen-to-detector gap. However, the velocity of the positive ions is limited by diffusion.

Download Full-text