Sub-Ångstrom Resolution
Antoni van Leeuwenhoek showed the practical use of the light microscope in the 1600s after much effort to improve the quality of optical lenses. Pioneering microscopists such as Ernst Abbé, Hermann Ludwig Ferdinand von Helmholtz, Lord John Rayleigh, Carl Zeiss, and August Köhler then brought us to the brink of optimal performance of the light microscope approximately a century ago, Ernst Ruska and Max Knoll showed in the 1930s that high-energy electrons could be used in place of light, giving greatly improved resolution. In the 1970's Albert Crewe and co-workers developed the scanning transmission electron microscope (STEM) and used the Z-contrast method to improve resolution in the electron microscope by about a factor of two. The scanning probe (nonoptical) microscopes aside, there hasn't been a significant advance in spatial resolution since.