A Novel Diode Detector in a Scanning Transmission Microscope
High-resolution in a scanning transmission electron microscope can be obtained using a condenser-objective lens. A suitable semiconductor diode is an efficient detector of high-energy electrons; an annular detector allows unscattered primary electrons or inelastically scattered electrons to pass through the hole, while elastically scattered electrons strike the diode, and are detected.Electrons passing through a thin sample may be elastically scattered through angles of many tens of milliradians, inelastically scattered with angular deflections of ∼ 1 mr, or not scattered at all. The inelastically scattered electrons do not depart significantly from the unscattered beam. Since the beam convergence angle at the sample is typically a few milliradians, the elastically scattered electrons can be collected using a detector with a hole positioned at the beam axis to allow the inelastically scattered electrons and the unscattered electrons to pass through. These electrons can be separated with an electron spectrometer to provide important contrast effects.