scholarly journals Atomic Layer Deposition of Molybdenum and Tungsten Oxide Thin Films Using Heteroleptic Imido-Amidinato Precursors: Process Development, Film Characterization, and Gas Sensing Properties

2018 ◽  
Vol 30 (23) ◽  
pp. 8690-8701 ◽  
Author(s):  
Miika Mattinen ◽  
Jan-Lucas Wree ◽  
Niklas Stegmann ◽  
Engin Ciftyurek ◽  
Mhamed El Achhab ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tungsten Oxide ◽  
Process Development ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Gas Sensing Properties ◽  
Tungsten Oxide Thin Films

Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition

2003 ◽  
Vol 93 (1-3) ◽  
pp. 552-555 ◽  
Author(s):  
A. Rosental ◽  
A. Tarre ◽  
A. Gerst ◽  
J. Sundqvist ◽  
A. Hårsta ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Gas Sensing Properties ◽  
Sno2 Thin Films

scholarly journals Gas sensing properties of very thin TiO2films prepared by atomic layer deposition (ALD)

2014 ◽  
Vol 559 ◽  
pp. 012013 ◽  
Author(s):  
S Boyadjiev ◽  
V Georgieva ◽  
L Vergov ◽  
Zs Baji ◽  
F Gáber ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Gas Sensing Properties

scholarly journals The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition

Sensors ◽  
2018 ◽  
Vol 18 (3) ◽  
pp. 735 ◽  
Author(s):  
Rachel Wilson ◽  
Cristian Simion ◽  
Christopher Blackman ◽  
Claire Carmalt ◽  
Adelina Stanoiu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Film Thickness ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Gas Sensing Properties

NOx gas sensing properties of tungsten oxide thin films synthesized by pulsed laser deposition method

2002 ◽  
Vol 197-198 ◽  
pp. 547-551 ◽  
Author(s):  
Hiroharu Kawasaki ◽  
Jun Namba ◽  
Keitarou Iwatsuji ◽  
Yoshiaki Suda ◽  
Kenji Wada ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Tungsten Oxide ◽  
Gas Sensing ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Deposition Method ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Tungsten Oxide Thin Films

Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma

2018 ◽  
Vol 36 (1) ◽  
pp. 01B103 ◽  
Author(s):  
Shashank Balasubramanyam ◽  
Akhil Sharma ◽  
Vincent Vandalon ◽  
Harm C. M. Knoops ◽  
Wilhelmus M. M. (Erwin) Kessels ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tungsten Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Tungsten Oxide Thin Films ◽  
O2 Plasma

The APCVD of tungsten oxide thin films from reaction of WCl6 with ethanol and results on their gas-sensing properties

Polyhedron ◽  
2007 ◽  
Vol 26 (7) ◽  
pp. 1493-1498 ◽  
Author(s):  
Sobia Ashraf ◽  
Russell Binions ◽  
Christopher S. Blackman ◽  
Ivan P. Parkin
Keyword(s):  
Thin Films ◽  
Tungsten Oxide ◽  
Gas Sensing ◽  
Oxide Thin Films ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Tungsten Oxide Thin Films

Gas-sensing properties of sputtered thin films of tungsten oxide

1997 ◽  
Vol 30 (23) ◽  
pp. 3211-3215 ◽  
Author(s):  
M Di Giulio ◽  
D Manno ◽  
G Micocci ◽  
A Serra ◽  
A Tepore
Keyword(s):  
Thin Films ◽  
Tungsten Oxide ◽  
Gas Sensing ◽  
Sensing Properties ◽  
Gas Sensing Properties
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