Characterization of Spin-On Glass Films as a Planarizing Dielectric
Keyword(s):
2001 ◽
Vol 19
(5)
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pp. 1788
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Keyword(s):
1991 ◽
Vol 34
(11)
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pp. 1239-1246
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2000 ◽
Vol 39
(Part 1, No. 3A)
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pp. 1070-1073
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2009 ◽
Vol 355
(37-42)
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pp. 1984-1988
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1991 ◽
Vol 34
(11)
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pp. 1231-1237
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1994 ◽
Vol 25
(1)
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pp. 53-59
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