Molecular Orbital Studies of Titanium Nitride Chemical Vapor Deposition:  Gas Phase Complex Formation, Ligand Exchange, and Elimination Reactions

2000 ◽  
Vol 12 (8) ◽  
pp. 2466-2474 ◽  
Author(s):  
Jason B. Cross ◽  
H. Bernhard Schlegel
Keyword(s):  
Chemical Vapor Deposition ◽  
Complex Formation ◽  
Titanium Nitride ◽  
Gas Phase ◽  
Molecular Orbital ◽  
Vapor Deposition ◽  
Ligand Exchange ◽  
Chemical Vapor ◽  
Phase Complex ◽  
Elimination Reactions

Thermodynamics and kinetics of initial gas phase reactions in chemical vapor deposition of titanium nitride. Theoretical study of TiCl4 ammonolysis

2001 ◽  
Vol 22 (13) ◽  
pp. 1366-1376 ◽  
Author(s):  
Stanislav Ya. Umanskii ◽  
Konstantin P. Novoselov ◽  
Airat Kh. Minushev ◽  
Magdalena Siodmiak ◽  
Gernot Frenking ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Titanium Nitride ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Theoretical Study ◽  
Chemical Vapor ◽  
Gas Phase Reactions ◽  
Thermodynamics And Kinetics ◽  
Kinetics Of

scholarly journals Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

2017 ◽  
Vol 121 (47) ◽  
pp. 26465-26471 ◽  
Author(s):  
Mewlude Imam ◽  
Laurent Souqui ◽  
Jan Herritsch ◽  
Andreas Stegmüller ◽  
Carina Höglund ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition ◽  
Gas Phase Chemistry ◽  
Phase Chemistry
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