Fabrication of high-performance p-type thin film transistors using atomic-layer-deposited SnO films

2017 ◽  
Vol 5 (12) ◽  
pp. 3139-3145 ◽  
Author(s):  
Soo Hyun Kim ◽  
In-Hwan Baek ◽  
Da Hye Kim ◽  
Jung Joon Pyeon ◽  
Taek-Mo Chung ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Channel Layer ◽  
Layer Deposition ◽  
P Type

Here, we demonstrate high-performance p-type thin film transistors (TFTs) with a SnO channel layer grown by atomic layer deposition (ALD).

8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process

2021 ◽  
Vol 52 (S2) ◽  
pp. 141-141
Author(s):  
Dedong Han ◽  
Huijin Li ◽  
Junchen Dong ◽  
Xiaobin Zhou ◽  
Qi Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Deposition Process ◽  
Oxide Thin Film ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

P‐13: High Performance a ‐IGZO Thin‐Film Transistors Grown by Atomic Layer Deposition: Cation Combinatorial Approach

2019 ◽  
Vol 50 (1) ◽  
pp. 1259-1262 ◽  
Author(s):  
Min Hoe Cho ◽  
Hyunjoo Seol ◽  
Nuri On ◽  
Tai Kyu Kim ◽  
Pil Sang Yun ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Combinatorial Approach ◽  
Layer Deposition

High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

2019 ◽  
Vol 11 (16) ◽  
pp. 14892-14901 ◽  
Author(s):  
In-Hwan Baek ◽  
Jung Joon Pyeon ◽  
Seong Ho Han ◽  
Ga-Yeon Lee ◽  
Byung Joon Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Tin Oxide Films

High-Performance Thin-Film Transistors with ZnO/Al2O3 Superlattice Channel by Atomic Layer Deposition

2016 ◽  
Author(s):  
G.D. Cui ◽  
D.D. Han ◽  
J.C. Dong ◽  
Y.Y. Cong ◽  
X.M. Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Layer Deposition

Stable and High-Performance Flexible ZnO Thin-Film Transistors by Atomic Layer Deposition

2015 ◽  
Vol 7 (40) ◽  
pp. 22610-22617 ◽  
Author(s):  
Yuan-Yu Lin ◽  
Che-Chen Hsu ◽  
Ming-Hung Tseng ◽  
Jing-Jong Shyue ◽  
Feng-Yu Tsai
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition
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