Local crystal structure in the vicinity of Cr in doped AlN thin films studied by X-ray absorption spectroscopy
2018 ◽
Vol 20
(18)
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pp. 13084-13091
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Keyword(s):
X Ray
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This article reports the detailed X-ray absorption spectroscopy (XAS) study of Al1−xCrxN (x = 4, 6, 11%) thin films synthesized by the reactive magnetron co-sputtering technique.