Local crystal structure and mechanical properties of sputtered Ti-doped AlN thin films
2018 ◽
Vol 20
(47)
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pp. 29817-29825
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Keyword(s):
X Ray
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In this article, we predominantly report the investigation of the local crystal structure around a Ti dopant by X-ray absorption spectroscopy (XAS) and the nano-mechanical properties of co-sputtered Al1−xTixN (x = 0 to 4%) thin films.