Effects of annealing temperature on properties of InSnZnO thin film transistors prepared by Co-sputtering
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Indium-tin-zinc-oxide (ITZO) as the channel layer grown by co-sputtering of ZnO target and ITO target in the bottom gate thin-film transistors (TFTs) is proposed in this work.
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2013 ◽
Vol 34
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pp. 517-519
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2018 ◽
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pp. 5913-5918
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2011 ◽
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pp. 024104
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pp. H348
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