A highly sensitive and flexible capacitive pressure sensor based on a micro-arrayed polydimethylsiloxane dielectric layer

A flexible pressure sensor with high sensitivity has been proposed which consists of a typical sandwich structure by integrating a PDMS substrate with a micro-arrayed PDMS dielectric layer.

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Study of High-Temperature MEMS Pressure Sensor Based on SiC-AlN Structure

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.562-565.471 ◽

2013 ◽

Vol 562-565 ◽

pp. 471-476 ◽

Cited By ~ 1

Author(s):

Hao Jie Lv ◽

Tao Geng ◽

Guo Qing Hu

Keyword(s):

High Temperature ◽

Pressure Sensor ◽

Sandwich Structure ◽

High Sensitivity ◽

High Accuracy ◽

External Pressure ◽

Harsh Environment ◽

Capacitive Pressure Sensor ◽

Technical Process ◽

Higher Temperature

In the paper, a touch mode capacitive pressure sensor with double-notches structure is presented. The sensor employs a special SiC-AlN-SiC sandwich structure to achieve high-accuracy pressure measurement in hash environment such as high-temperature. The analysis to the relation of capacitance and external pressure of the sensor shows that the sensor has high sensitivity and long linear range simultaneously. In addition, the technical process of the sensor has been designed in detail in the paper. The research shows that the sensor packaged in a high-temperature ceramic AlN can withstand higher temperature. Consequently, the sensor can be applied in high-temperature and harsh environment.

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Flexible Pressure Sensor Based on Photo Paper-Molded Micro-Structural AgNWs/PDMS Electrode

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.748.1 ◽

2015 ◽

Vol 748 ◽

pp. 1-4 ◽

Cited By ~ 1

Author(s):

Li Xin Mo ◽

Yu Qun Hou ◽

Qing Bin Zhai ◽

Wen Guan Zhang ◽

Lu Hai Li

Keyword(s):

Pressure Sensor ◽

Silver Nanowires ◽

Low Cost ◽

Flexible Substrate ◽

High Sensitivity ◽

Low Energy ◽

Capacitive Pressure Sensor ◽

Micro Structure ◽

Energy Consuming ◽

Flexible Pressure Sensor

The novel flexible pressure sensor with skin-like stretchability and sensibility has attracted tremendous attention in academic and industrial world in recent years. And it also has demonstrated great potential in the applications of electronic skin and wearable devices. It is significant and challenging to develop a highly sensitive flexible pressure sensor with a simple, low energy consuming and low cost method. In this paper, the silver nanowires (AgNWs) as electrode material were synthesized by polyol process. The polydimethylsiloxane (PDMS) was chosen as a flexible substrate and polyimide (PI) film as dielectric layer. The AgNWs based electrode was prepared in two methods. One is coating the AgNWs on photographic paper followed by in situ PDMS curing. Another one is suction filtration of the AgNWs suspension followed by glass slide transfer and PDMS curing. Then the capacitive pressure sensor was packaged in a sandwich structure with two face to face electrodes and a PI film in the middle. The sensitivity of the sensor as well as the micro-structure of the electrodes was compared and studied. The results indicate that the roughness of the electrode based on AgNWs/PDMS micro-structure plays an important role in the sensitivity of sensor. The as-prepared flexible pressure sensor demonstrates high sensitivity of 0.65kPa-1. In addition, the fabrication method is simple, low energy consuming and low cost, which has great potential in the detection of pulse, heart rate, sound vibration and other tiny pressure.

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Highly Sensitive Flexible Pressure Sensor with Microstructural Dielectric Layer

Lecture Notes in Electrical Engineering - Advanced Graphic Communications and Media Technologies ◽

10.1007/978-981-10-3530-2_133 ◽

2017 ◽

pp. 1087-1094 ◽

Cited By ~ 1

Author(s):

Zhengbo Li ◽

Lianfang Li ◽

Lixin Mo ◽

Zhenguo Wang ◽

Wei Yang ◽

...

Keyword(s):

Pressure Sensor ◽

Dielectric Layer ◽

Highly Sensitive ◽

Flexible Pressure Sensor

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A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor

Microsystems & Nanoengineering ◽

10.1038/s41378-021-00327-1 ◽

2021 ◽

Vol 7 (1) ◽

Author(s):

Ruzhan Qin ◽

Mingjun Hu ◽

Xin Li ◽

Te Liang ◽

Haoyi Tan ◽

...

Keyword(s):

Pressure Sensor ◽

Pressure Sensors ◽

High Sensitivity ◽

Capacitive Sensor ◽

Capacitive Pressure Sensor ◽

Interdigital Electrode ◽

Interdigital Electrodes ◽

Highly Sensitive ◽

New Strategy ◽

Application Prospects

AbstractThe development of flexible capacitive pressure sensors has wide application prospects in the fields of electronic skin and intelligent wearable electronic devices, but it is still a great challenge to fabricate capacitive sensors with high sensitivity. Few reports have considered the use of interdigital electrode structures to improve the sensitivity of capacitive pressure sensors. In this work, a new strategy for the fabrication of a high-performance capacitive flexible pressure sensor based on MXene/polyvinylpyrrolidone (PVP) by an interdigital electrode is reported. By increasing the number of interdigital electrodes and selecting the appropriate dielectric layer, the sensitivity of the capacitive sensor can be improved. The capacitive sensor based on MXene/PVP here has a high sensitivity (~1.25 kPa−1), low detection limit (~0.6 Pa), wide sensing range (up to 294 kPa), fast response and recovery times (~30/15 ms) and mechanical stability of 10000 cycles. The presented sensor here can be used for various pressure detection applications, such as finger pressing, wrist pulse measuring, breathing, swallowing and speech recognition. This work provides a new method of using interdigital electrodes to fabricate a highly sensitive capacitive sensor with very promising application prospects in flexible sensors and wearable electronics.

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Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range

Energy Harvesting and Systems ◽

10.1515/ehs-2021-0017 ◽

2021 ◽

Vol 0 (0) ◽

Author(s):

Hamid Reza Ansari ◽

Zoheir Kordrostami

Keyword(s):

Pressure Sensor ◽

Dielectric Layer ◽

Pressure Range ◽

High Sensitivity ◽

Low Pressure ◽

Air Gap ◽

Capacitive Pressure Sensor ◽

Aluminium Nitrate ◽

Mems Sensor ◽

Capacitive Mems

Abstract In this paper, the improvement of the sensitivity of a capacitive MEMS pressure sensor is investigated. The proposed spring for the sensor can increase the sensitivity. Silicon is used as the substrate and gold and aluminium nitrate are used as the diaphragm and the dielectric layer, respectively. The dimensions of the diaphragm are 150 µm × 150 µm, which is suspended by four springs. The air gap between the diaphragm and the top electrode is 1.5 µm. The proposed structure is an efficient sensor for the pressures in the range of 1–20 kPa. By using the proposed design, the sensitivity of the MEMS sensor in 18 kPa has improved to 663 (× 10−3 pF/kPa).

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Flexible Capacitive Pressure Sensors with Micro-Patterned Porous Dielectric Layer for Wearable Electronics

Journal of Micromechanics and Microengineering ◽

10.1088/1361-6439/ac49a3 ◽

2022 ◽

Author(s):

Jing Wang ◽

Longwei Li ◽

Lanshuang Zhang ◽

Panpan Zhang ◽

Xiong Pu

Keyword(s):

Pressure Sensor ◽

Flexible Electronics ◽

Dielectric Layer ◽

Pressure Sensors ◽

High Sensitivity ◽

Capacitive Sensor ◽

Human Motion ◽

Capacitive Pressure Sensor ◽

Wearable Electronics ◽

Emulsified Water

Abstract Highly sensitive soft sensors play key roles in flexible electronics, which therefore have attracted much attention in recent years. Herein, we report a flexible capacitive pressure sensor with high sensitivity by using engineered micro-patterned porous polydimethylsiloxane (PDMS) dielectric layer through an environmental-friendly fabrication procedure. The porous structure is formed by evaporation of emulsified water droplets during PDMS curing process, while the micro-patterned structure is obtained via molding on sandpaper. Impressively, this structure renders the capacitive sensor with a high sensitivity up to 143.5 MPa-1 at the pressure range of 0.068~150 kPa and excellent anti-fatigue performance over 20,000 cycles. Meanwhile, the sensor can distinguish different motions of the same person or different people doing the same action. Our work illustrates the promising application prospects of this flexible pressure sensor for the security field or human motion monitoring area.

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A wearable and highly sensitive capacitive pressure sensor integrated a dual-layer dielectric layer of PDMS microcylinder array and PVDF electrospun fiber

Organic Electronics ◽

10.1016/j.orgel.2021.106290 ◽

2021 ◽

pp. 106290

Author(s):

Ming-Feng Lin ◽

Chia Cheng ◽

Ching-Ching Yang ◽

Wen-Tse Hsiao ◽

Chii-Rong Yang

Keyword(s):

Pressure Sensor ◽

Dielectric Layer ◽

Electrospun Fiber ◽

Capacitive Pressure Sensor ◽

Highly Sensitive

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Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

Sensors ◽

10.3390/s20020371 ◽

2020 ◽

Vol 20 (2) ◽

pp. 371 ◽

Cited By ~ 5

Author(s):

Mengmeng Li ◽

Jiaming Liang ◽

Xudong Wang ◽

Min Zhang

Keyword(s):

Pressure Sensor ◽

Dielectric Layer ◽

Pressure Sensors ◽

High Sensitivity ◽

Capacitive Sensor ◽

Duty Ratio ◽

Capacitive Pressure Sensor ◽

Element Analysis ◽

Sequential Coupling ◽

Flexible Pressure Sensors

Flexible pressure sensors with a high sensitivity in the lower zone of a subtle-pressure regime has shown great potential in the fields of electronic skin, human–computer interaction, wearable devices, intelligent prosthesis, and medical health. Adding microstructures on the dielectric layer on a capacitive pressure sensor has become a common and effective approach to enhance the performance of flexible pressure sensors. Here, we propose a method to further dramatically increase the sensitivity by adding elastic pyramidal microstructures on one side of the electrode and using a thin layer of a dielectric in a capacitive sensor. The sensitivity of the proposed device has been improved from 3.1 to 70.6 kPa−1 compared to capacitive sensors having pyramidal microstructures in the same dimension on the dielectric layer. Moreover, a detection limit of 1 Pa was achieved. The finite element analysis performed based on electromechanical sequential coupling simulation for hyperelastic materials indicates that the microstructures on electrode are critical to achieve high sensitivity. The influence of the duty ratio of the micro-pyramids on the sensitivity of the sensor is analyzed by both simulation and experiment. The durability and robustness of the device was also demonstrated by pressure testing for 2000 cycles.

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