Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane
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Two consecutive vapor-to-solid ring opening reactions were applied for thin film siloxane polymerization by molecular layer deposition (MLD).
2015 ◽
Vol 3
(40)
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pp. 10349-10361
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2012 ◽
Vol 1
(4)
◽
pp. P210-P215
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