A low-temperature route for producing epitaxial perovskite superlattice structures on (001)-oriented SrTiO3/Si substrates

2021 ◽  
Author(s):  
Aleksandr V. Plokhikh ◽  
Iryna S. Golovina ◽  
Matthias Falmbigl ◽  
Igor A. Karateev ◽  
Alexander L. Vasiliev ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Molecular Beam ◽  
Atomic Layer ◽  
Perovskite Oxide ◽  
Si Substrates ◽  
Layer Deposition ◽  
Superlattice Structures

We report on the formation of epitaxial perovskite oxide superlattice structures by atomic layer deposition (ALD), which are integrated monolithically on Si wafers using a template layer of SrTiO3 deposited by hybrid molecular beam epitaxy.

scholarly journals Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition

2018 ◽  
Vol 6 (24) ◽  
pp. 6471-6482 ◽  
Author(s):  
Ali Haider ◽  
Petro Deminskyi ◽  
Mehmet Yilmaz ◽  
Kholoud Elmabruk ◽  
Ibrahim Yilmaz ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Low Temperature Plasma ◽  
Anodized Aluminum ◽  
Temperature Plasma ◽  
Anodized Aluminum Oxide ◽  
Si Substrates ◽  
Cylinder Arrays ◽  
Layer Deposition

In this work, we demonstrate vertical GaN, AlN, and InN hollow nano-cylindrical arrays (HNCs) grown on Si substrates using anodized aluminum oxide (AAO) membrane templated low-temperature plasma-assisted atomic layer deposition (PA-ALD).

Molecular beam epitaxy grown template for subsequent atomic layer deposition of high κ dielectrics

2006 ◽  
Vol 89 (22) ◽  
pp. 222906 ◽  
Author(s):  
K. Y. Lee ◽  
W. C. Lee ◽  
Y. J. Lee ◽  
M. L. Huang ◽  
C. H. Chang ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Atomic Layer Deposition ◽  
Molecular Beam ◽  
Atomic Layer ◽  
Layer Deposition

Surface Passivation of GaSb(100) Using Molecular Beam Epitaxy of Y2O3and Atomic Layer Deposition of Al2O3: A Comparative Study

2013 ◽  
Vol 6 (12) ◽  
pp. 121201 ◽  
Author(s):  
Rei-Lin Chu ◽  
Wei-Jen Hsueh ◽  
Tsung-Hung Chiang ◽  
Wei-Chin Lee ◽  
Hsiao-Yu Lin ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Atomic Layer Deposition ◽  
Comparative Study ◽  
Molecular Beam ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals ZnTe–ZnO core–shell radial heterostructures grown by the combination of molecular beam epitaxy and atomic layer deposition

2009 ◽  
Vol 21 (1) ◽  
pp. 015302 ◽  
Author(s):  
E Janik ◽  
A Wachnicka ◽  
E Guziewicz ◽  
M Godlewski ◽  
S Kret ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Atomic Layer Deposition ◽  
Molecular Beam ◽  
Atomic Layer ◽  
Core Shell ◽  
Layer Deposition
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