Enhancement of Electrical Performance of Atomic Layer Deposited SnO Films via Substrate Surface Engineering
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Atomic layer deposition (ALD) is a technique based on the surface reaction of precursors; thus, it strongly depends on the surface states of the substrate. We demonstrate significant changes in...
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2019 ◽
Vol 37
(2)
◽
pp. 020922
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2020 ◽
Vol 6
(7)
◽
pp. 1765-1785
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