High‐power radio frequency generation in a hollow‐cathode discharge

1995 ◽  
Vol 66 (10) ◽  
pp. 1193-1195 ◽  
Author(s):  
D. Arbel ◽  
Z. Bar‐Lev ◽  
J. Felsteiner ◽  
A. Rosenberg ◽  
Ya. Z. Slutsker
Keyword(s):  
Radio Frequency ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Frequency Generation

Comparison of plasma characteristics of high-power pulsed sputtering glow discharge and hollow-cathode discharge

2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura
Keyword(s):  
Glow Discharge ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Plasma Characteristics

Study of high-power pulsed RF generators based on a hollow-cathode discharge

2009 ◽  
Vol 35 (11) ◽  
pp. 941-961 ◽  
Author(s):  
S. V. Bulychev ◽  
D. V. Vyalykh ◽  
A. E. Dubinov ◽  
V. S. Zhdanov ◽  
I. Yu. Kornilova ◽  
...  
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Pulsed Rf

High-Power Compact $P$ -Band UHF Oscillator Based on Hollow Cathode Discharge

2015 ◽  
Vol 43 (6) ◽  
pp. 1906-1910 ◽  
Author(s):  
Sergey V. Bulychev ◽  
Alexander E. Dubinov ◽  
Igor L. L'vov ◽  
Sergey A. Sadovoy ◽  
Victor D. Selemir ◽  
...  
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge

The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics

2014 ◽  
Vol 16 (7) ◽  
pp. 669-676 ◽  
Author(s):  
Guoming Zhao ◽  
Qian Sun ◽  
Shuxia Zhao ◽  
Shuxia Gao ◽  
Lianzhu Zhang
Keyword(s):  
Radio Frequency ◽  
Flow Rate ◽  
Hollow Cathode ◽  
Gas Flow ◽  
Hollow Cathode Discharge ◽  
Gas Flow Rate ◽  
Discharge Characteristics

A high-power, high-frequency pulse generator based on a hollow-cathode discharge

2005 ◽  
Vol 48 (1) ◽  
pp. 71-74 ◽  
Author(s):  
D. V. Vyalykh ◽  
A. E. Dubinov ◽  
I. L. L?vov ◽  
S. A. Sadovoi ◽  
V. D. Selemir
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
High Frequency ◽  
Pulse Generator ◽  
Hollow Cathode Discharge ◽  
Frequency Pulse

Hollow cathode and hybrid atmospheric plasma sources

2008 ◽  
Vol 80 (9) ◽  
pp. 1931-1937 ◽  
Author(s):  
Hana Baránková ◽  
Ladislav Bardos
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Hollow Cathode Discharge ◽  
Atmospheric Plasma ◽  
Plasma Sources ◽  
Pressure Plasma ◽  
Hollow Electrode

Generation and features of the radio frequency (RF) hollow cathode discharge (HCD) are compared for the atmospheric and moderate pressures. The atmospheric-pressure plasma systems, fused hollow cathode (FHC) and hybrid hollow electrode-activated discharge (H-HEAD), are described. Examples of applications where both FHC and H-HEAD have already been employed are given, and potentials for new processes are discussed.

Plasma processing of AISI 304 stainless steel using radio frequency hollow cathode discharge

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8650-8653 ◽  
Author(s):  
X.B. Tian ◽  
H.F. Jiang ◽  
S.Q. Yang ◽  
Z.J. Luo ◽  
R.K.Y. Fu ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Hollow Cathode Discharge ◽  
304 Stainless Steel ◽  
Aisi 304 Stainless Steel ◽  
Aisi 304

Production of High-Density Radio-Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench Shapes

2013 ◽  
Vol 41 (8) ◽  
pp. 1856-1862 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Yoshiki Yahata ◽  
Johji Kagami ◽  
Yasushi Kawashimo ◽  
Tatsuya Takeuchi
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Source ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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