Low-Temperature Growth of Thermal Quality SiO[sub 2] Thin Films in High-Density He/O[sub 2] Plasma Generated by RF Driven ICP Source
2004 ◽
Vol 7
(4)
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pp. G62
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2000 ◽
Vol 71
(2)
◽
pp. 1002-1005
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2008 ◽
Vol 354
(19-25)
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pp. 2079-2082
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1999 ◽
Vol 59
(2)
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pp. 120-124
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2001 ◽
Keyword(s):
2019 ◽
Vol 7
(6)
◽
pp. 244-250
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2019 ◽
Vol 59
(SC)
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pp. SCCC04
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