Negative bias temperature instability: Road to cross in deep submicron silicon semiconductor manufacturing

Dieter K. Schroder; Jeff A. Babcock

doi:10.1063/1.1567461

Negative bias temperature instability: Road to cross in deep submicron silicon semiconductor manufacturing

Journal of Applied Physics ◽

10.1063/1.1567461 ◽

2003 ◽

Vol 94 (1) ◽

pp. 1-18 ◽

Cited By ~ 727

Author(s):

Dieter K. Schroder ◽

Jeff A. Babcock

Keyword(s):

Semiconductor Manufacturing ◽

Deep Submicron ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

Download Full-text

Impact of Post Gate Oxidation Anneal on Negative Bias Temperature Instability of Deep Submicron PMOSFETs

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2003.16.3.181 ◽

2003 ◽

Vol 16 (3) ◽

pp. 181-185

Keyword(s):

Deep Submicron ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

Download Full-text

Mechanism of Threshold Voltage Shift (ΔVth) Caused by Negative Bias Temperature Instability (NBTI) in Deep Submicron pMOSFETs

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.2423 ◽

2002 ◽

Vol 41 (Part 1, No. 4B) ◽

pp. 2423-2425 ◽

Cited By ~ 36

Author(s):

Chuan-Hsi Liu ◽

Ming T. Lee ◽

Chih-Yung Lin ◽

Jenkon Chen ◽

Y. T. Loh ◽

...

Keyword(s):

Threshold Voltage ◽

Deep Submicron ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Threshold Voltage Shift ◽

Temperature Instability ◽

Voltage Shift ◽

Bias Temperature Instability

Download Full-text

An Approach to Detect Negative Bias Temperature Instability (NBTI) in Ultra-Deep Submicron Technologies

2007 IEEE International Symposium on Circuits and Systems ◽

10.1109/iscas.2007.378339 ◽

2007 ◽

Cited By ~ 3

Author(s):

Ronald Carlsten ◽

Jeremy Ralston-Good ◽

Douglas Goodman

Keyword(s):

Deep Submicron ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

Download Full-text

The Effect of Etch Stop Layer Stress on Negative Bias Temperature Instability of Deep Submicron p-MOSFETs

10.7567/ssdm.2007.p-3-13 ◽

2007 ◽

Author(s):

Ming Shing Chen ◽

Y. K. Fang ◽

T.H Lee ◽

C.T. Lin ◽

Joe Ko ◽

...

Keyword(s):

Deep Submicron ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability ◽

Etch Stop ◽

Etch Stop Layer

Download Full-text

New Multi-stages – Hydrogen Diffusion Model for Negative Bias Temperature Instability

Journal of Nano- and Electronic Physics ◽

10.21272/jnep.11(4).04018 ◽

2019 ◽

Vol 11 (4) ◽

pp. 04018-1-04018-6

Author(s):

M. Mallati ◽

◽

H. Bentarzi ◽

Keyword(s):

Diffusion Model ◽

Hydrogen Diffusion ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

Download Full-text

Defect Creation Stimulated by Thermally Activated Hole Trapping as the Driving Force Behind Negative Bias Temperature Instability in SiO2, SiON, and High-k Gate Stacks

2008 IEEE International Integrated Reliability Workshop Final Report ◽

10.1109/irws.2008.4796094 ◽

2008 ◽

Cited By ~ 7

Author(s):

Tibor Grasser ◽

Ben Kaczer ◽

Thomas Aichinger ◽

Wolfgang Goes ◽

Michael Nelhiebel

Keyword(s):

Driving Force ◽

Negative Bias ◽

Gate Stacks ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Thermally Activated ◽

Bias Temperature Instability ◽

Hole Trapping ◽

High K ◽

Defect Creation

Download Full-text

A novel Negative Bias Temperature Instability model for nanoscale Finfet

2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits ◽

10.1109/ipfa.2009.5232688 ◽

2009 ◽

Author(s):

Chenyue Ma ◽

Bo Li ◽

Frank He ◽

Xing Zhang ◽

Xinnan Lin

Keyword(s):

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

Download Full-text

Spin dependent recombination study of the atomic-scale effects of fluorine on the negative bias temperature instability

2009 IEEE International Reliability Physics Symposium ◽

10.1109/irps.2009.5173396 ◽

2009 ◽

Cited By ~ 2

Author(s):

J.T. Ryan ◽

P.M. Lenahan ◽

A.T. Krishnan ◽

S. Krishnan ◽

J.P. Campbell

Keyword(s):

Scale Effects ◽

Atomic Scale ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

Download Full-text

Mechanism and process dependence of negative bias temperature instability (NBTI) for pMOSFETs with ultrathin gate dielectrics

International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) ◽

10.1109/iedm.2001.979649 ◽

2002 ◽

Cited By ~ 22

Author(s):

C.H. Liu ◽

M.T. Lee ◽

Chih-Yung Lin ◽

J. Chen ◽

K. Schruefer ◽

...

Keyword(s):

Gate Dielectrics ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

Download Full-text

The Impact of Nitrogen Engineering in Silicon Oxynitride Gate Dielectric on Negative-Bias Temperature Instability of p-MOSFETs: A Study by Ultrafast On-The-Fly $I_{\rm DLIN}$ Technique

IEEE Transactions on Electron Devices ◽

10.1109/ted.2008.923524 ◽

2008 ◽

Vol 55 (7) ◽

pp. 1630-1638 ◽

Cited By ~ 39

Author(s):

Vrajesh D. Maheta ◽

Christopher Olsen ◽

Khaled Ahmed ◽

Souvik Mahapatra

Keyword(s):

Gate Dielectric ◽

Silicon Oxynitride ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability ◽

The Impact

Download Full-text