Fracture toughness of polycrystalline silicon carbide thin films

2005 ◽  
Vol 86 (7) ◽  
pp. 071920 ◽  
Author(s):  
J. J. Bellante ◽  
H. Kahn ◽  
R. Ballarini ◽  
C. A. Zorman ◽  
M. Mehregany ◽  
...  
Keyword(s):  
Thin Films ◽  
Fracture Toughness ◽  
Silicon Carbide ◽  
Polycrystalline Silicon ◽  
Polycrystalline Silicon Carbide

Enhanced Ohmic contact via graphitization of polycrystalline silicon carbide

2010 ◽  
Vol 97 (26) ◽  
pp. 262107 ◽  
Author(s):  
F. Liu ◽  
B. Hsia ◽  
C. Carraro ◽  
A. P. Pisano ◽  
R. Maboudian
Keyword(s):  
Silicon Carbide ◽  
Ohmic Contact ◽  
Polycrystalline Silicon ◽  
Polycrystalline Silicon Carbide

Pressure dependence of thin polycrystalline silicon carbide diaphragm resonators

2012 ◽  
Author(s):  
Andrew C. Barnes ◽  
Jaesung Lee ◽  
Patrick T. Rawlinson ◽  
Philip X.-L. Feng ◽  
Christian A. Zorman
Keyword(s):  
Silicon Carbide ◽  
Pressure Dependence ◽  
Polycrystalline Silicon ◽  
Polycrystalline Silicon Carbide ◽  
Thin Polycrystalline
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