Characterization of Thermoelectric Properties of Heavily Doped n-Type Polycrystalline Silicon Carbide Thin Films

IEEE Transactions on Electron Devices ◽

10.1109/ted.2012.2228867 ◽

2013 ◽

Vol 60 (1) ◽

pp. 513-517 ◽

Author(s):

Man I Lei ◽

Mehran Mehregany

Keyword(s):

Silicon Carbide ◽

Thermoelectric Properties ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide ◽

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Application of polycrystalline silicon carbide thin films as the passivating contacts for silicon solar cells

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2019.110329 ◽

2020 ◽

Vol 206 ◽

pp. 110329 ◽

Author(s):

Zhiyu Xu ◽

Ke Tao ◽

Shuai Jiang ◽

Rui Jia ◽

Wei Li ◽

...

Keyword(s):

Silicon Carbide ◽

Solar Cells ◽

Polycrystalline Silicon ◽

Silicon Solar Cells ◽

Polycrystalline Silicon Carbide

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Electrical and thermal characterization of 150 mm Silicon-on-polycrystalline-Silicon Carbide hybrid substrates

2010 IEEE International SOI Conference (SOI) ◽

10.1109/soi.2010.5641380 ◽

2010 ◽

Author(s):

S. Lotfi ◽

O. Vallin ◽

L.-G. Li ◽

L. Vestling ◽

H. Norstrom ◽

...

Keyword(s):

Silicon Carbide ◽

Polycrystalline Silicon ◽

Thermal Characterization ◽

Polycrystalline Silicon Carbide ◽

Hybrid Substrates

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Synthesis of Polycrystalline Silicon Carbide (SiC) Thin Films Using Pulsed Laser Deposition

ZnO Nanocrystals and Allied Materials - Springer Series in Materials Science ◽

10.1007/978-81-322-1160-0_10 ◽

2013 ◽

pp. 217-232 ◽

Author(s):

B. Venkataramesh ◽

Nilesh J. Vasa

Keyword(s):

Silicon Carbide ◽

Pulsed Laser Deposition ◽

Polycrystalline Silicon ◽

Pulsed Laser ◽

Laser Deposition ◽

Polycrystalline Silicon Carbide

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Fracture toughness of polycrystalline silicon carbide thin films

Applied Physics Letters ◽

10.1063/1.1864246 ◽

2005 ◽

Vol 86 (7) ◽

pp. 071920 ◽

Author(s):

J. J. Bellante ◽

H. Kahn ◽

R. Ballarini ◽

C. A. Zorman ◽

M. Mehregany ◽

...

Keyword(s):

Fracture Toughness ◽

Silicon Carbide ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide

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Fracture toughness of low-pressure chemical-vapor-deposited polycrystalline silicon carbide thin films

Journal of Applied Physics ◽

10.1063/1.2158135 ◽

2006 ◽

Vol 99 (1) ◽

pp. 013517 ◽

Author(s):

V. Hatty ◽

H. Kahn ◽

J. Trevino ◽

C. A. Zorman ◽

M. Mehregany ◽

...

Keyword(s):

Fracture Toughness ◽

Silicon Carbide ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Low Pressure ◽

Chemical Vapor Deposited ◽

Polycrystalline Silicon Carbide ◽

Pressure Chemical

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Effects of activated reactive evaporation process parameters on the microhardness of polycrystalline silicon carbide thin films

Thin Solid Films ◽

10.1016/0040-6090(94)90322-0 ◽

1994 ◽

Vol 253 (1-2) ◽

pp. 212-217 ◽

Author(s):

YongHwa Chris Cha ◽

Guho Kim ◽

Hans J. Doerr ◽

Rointan F. Bunshah

Keyword(s):

Silicon Carbide ◽

Process Parameters ◽

Polycrystalline Silicon ◽

Evaporation Process ◽

Reactive Evaporation ◽

Polycrystalline Silicon Carbide ◽

Activated Reactive Evaporation

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Low-stress, heavily-doped polycrystalline silicon carbide for MEMS applications

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. ◽

10.1109/memsys.2005.1453964 ◽

2005 ◽

Author(s):

J. Trevino ◽

Xiao-An Fu ◽

M. Mehregany ◽

C. Zorman

Keyword(s):

Silicon Carbide ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide ◽

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TEM/EELS Characterization of a Sintered Polycrystalline Silicon Carbide Fiber

Journal of the American Ceramic Society ◽

10.1111/j.1151-2916.1998.tb02585.x ◽

2005 ◽

Vol 81 (8) ◽

pp. 2037-2044 ◽

Author(s):

H. Tenailleau ◽

Xavier Bourrat ◽

Roger Naslain ◽

Richard E. Tressler ◽

Lucille A. Giannuzzi

Keyword(s):

Silicon Carbide ◽

Polycrystalline Silicon ◽

Silicon Carbide Fiber ◽

Polycrystalline Silicon Carbide

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Fabrication and Characterization of 150-mm Silicon-on-Polycrystalline Silicon Carbide Substrates

Journal of Electronic Materials ◽

10.1007/s11664-011-1827-2 ◽

2011 ◽

Vol 41 (3) ◽

pp. 480-487 ◽

Author(s):

S. Lotfi ◽

L.-G. Li ◽

Ö. Vallin ◽

H. Norström ◽

J. Olsson

Keyword(s):

Silicon Carbide ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide ◽

Fabrication And Characterization

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Nanoindentation of polycrystalline silicon-carbide thin films studied by acoustic emission

Applied Physics Letters ◽

10.1063/1.1784880 ◽

2004 ◽

Vol 85 (10) ◽

pp. 1695-1697 ◽

Author(s):

X.-G. Ma ◽

K. Komvopoulos ◽

D. B. Bogy

Keyword(s):

Silicon Carbide ◽

Acoustic Emission ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide

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