Electrical characterization of radio‐frequency discharges in the Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577783 ◽

1992 ◽

Vol 10 (6) ◽

pp. 3550-3562 ◽

Author(s):

Mark A. Sobolewski

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Reference Cell ◽

Radio Frequency Discharges ◽

Gaseous Electronics Conference

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Electrical characterization of radio frequency discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/14/2/s08 ◽

2005 ◽

Vol 14 (2) ◽

pp. S60-S67 ◽

Author(s):

C M O Mahony ◽

P D Maguire ◽

W G Graham

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Radio Frequency Discharges

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Electrical Characterization of Capacitively Coupled Radio Frequency Discharges in Hydrogen

Plasma Processes and Polymers ◽

10.1002/ppap.200732303 ◽

2007 ◽

Vol 4 (S1) ◽

pp. S937-S941 ◽

Author(s):

Luís S. A. Marques ◽

Jacques Jolly ◽

Luís L. Alves

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Capacitively Coupled ◽

Radio Frequency Discharges

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Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Journal of Applied Physics ◽

10.1063/1.3000667 ◽

2008 ◽

Vol 104 (8) ◽

pp. 083303 ◽

Author(s):

S. V. Singh ◽

C. Pargmann

Keyword(s):

Electrical Characterization ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Electrical characterization of radio‐frequency parallel‐plate capacitively coupled discharges

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576177 ◽

1989 ◽

Vol 7 (4) ◽

pp. 2774-2783 ◽

Author(s):

B. Andries ◽

G. Ravel ◽

L. Peccoud

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Electrical Characterization ◽

Capacitively Coupled

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Power coupling and electrical characterization of a radio-frequency micro atmospheric pressure plasma jet

Plasma Sources Science and Technology ◽

10.1088/0963-0252/23/6/062005 ◽

2014 ◽

Vol 23 (6) ◽

pp. 062005 ◽

Author(s):

D Marinov ◽

N St J Braithwaite

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Electrical Characterization ◽

Atmospheric Pressure Plasma ◽

Atmospheric Pressure Plasma Jet ◽

Power Coupling ◽

Pressure Plasma

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Electrical Characterization of Metal–Insulator–Metal Capacitors with Atomic-Layer-Deposited HfO 2 Dielectrics for Radio Frequency Integrated Circuit Application

Chinese Physics Letters ◽

10.1088/0256-307x/24/10/063 ◽

2007 ◽

Vol 24 (10) ◽

pp. 2942-2944 ◽

Author(s):

Huang Yu-Jian ◽

Huang Yue ◽

Ding Shi-Jin ◽

Zhang Wei ◽

Liu Ran

Keyword(s):

Radio Frequency ◽

Integrated Circuit ◽

Electrical Characterization ◽

Atomic Layer ◽

Metal Insulator ◽

Metal Insulator Metal

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The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges

Review of Scientific Instruments ◽

10.1063/1.1144770 ◽

1994 ◽

Vol 65 (1) ◽

pp. 140-154 ◽

Author(s):

P. J. Hargis ◽

K. E. Greenberg ◽

P. A. Miller ◽

J. B. Gerardo ◽

J. R. Torczynski ◽

...

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Plasma Processing ◽

Theoretical Studies ◽

Frequency Reference ◽

Reference Cell ◽

Gaseous Electronics Conference ◽

Experimental And Theoretical Studies

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Electrical characterization of radio-frequency sputtering gas discharge

Microelectronics Reliability ◽

10.1016/0026-2714(70)90098-3 ◽

1970 ◽

Vol 9 (3) ◽

pp. 230

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Gas Discharge ◽

Radio Frequency Sputtering

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Electrical characterization of Au/Pd/n-GaN/Pd/Au device structure in the radio frequency range by simulation study

Synthetic Metals ◽

10.1016/j.synthmet.2011.05.018 ◽

2011 ◽

Vol 161 (13-14) ◽

pp. 1434-1440 ◽

Author(s):

A. Sertap Kavasoglu ◽

Nese Kavasoglu ◽

Gorkem Oylumluoglu

Keyword(s):

Radio Frequency ◽

Simulation Study ◽

Electrical Characterization ◽

Frequency Range ◽

Device Structure

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Radio frequency voltage division between two plasma sheaths in the Gaseous Electronics Conference reference cell

Applied Physics Letters ◽

10.1063/1.113941 ◽

1995 ◽

Vol 66 (17) ◽

pp. 2186-2187 ◽

Author(s):

Yicheng Wang

Keyword(s):

Radio Frequency ◽

Reference Cell ◽

Voltage Division ◽

Plasma Sheaths ◽

Gaseous Electronics Conference ◽

Radio Frequency Voltage

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