Comparison of thin‐film transistors fabricated at low temperatures (≤600 °C) on as‐deposited and amorphized‐crystallized polycrystalline Si

1987 ◽  
Vol 61 (4) ◽  
pp. 1638-1642 ◽  
Author(s):  
K. T.‐Y. Kung ◽  
R. Reif
Keyword(s):  
Thin Film ◽  
Low Temperatures ◽  
Thin Film Transistors

scholarly journals Enabling high performance n-type metal oxide semiconductors at low temperatures for thin film transistors

2020 ◽  
Vol 7 (9) ◽  
pp. 1822-1844 ◽  
Author(s):  
Nidhi Tiwari ◽  
Amoolya Nirmal ◽  
Mohit Rameshchandra Kulkarni ◽  
Rohit Abraham John ◽  
Nripan Mathews
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Low Temperatures ◽  
Thin Film Transistors ◽  
High Performance ◽  
Metal Oxide Semiconductors ◽  
Oxide Semiconductors ◽  
Temperature Activation

The review highlights low temperature activation processes for high performance n-type metal oxide semiconductors for TFTs.

Electrical Conductions of High Mobility Poly-Si Thin Film Transistors at Low Temperatures

1994 ◽  
Vol 33 (Part 2, No. 3B) ◽  
pp. L409-L412 ◽  
Author(s):  
Tadashi Serikawa ◽  
Seiiti Shirai ◽  
Sadao Takaoka ◽  
Kazuo Murase ◽  
Shuichi Ishida
Keyword(s):  
Thin Film ◽  
Low Temperatures ◽  
Thin Film Transistors ◽  
High Mobility ◽  
Si Thin Film

Performance and stability of amorphous In-Ga-Zn-O thin film transistors involving gate insulators synthesized at low temperatures

2017 ◽  
Vol 729 ◽  
pp. 1195-1200 ◽  
Author(s):  
Dae-Gyu Yang ◽  
Hyoung-Do Kim ◽  
Jong Heon Kim ◽  
Kyung Park ◽  
Jung Hyun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperatures ◽  
Thin Film Transistors ◽  
Gate Insulators

Soluble oxide gate dielectrics prepared using the self-combustion reaction for high-performance thin-film transistors

2014 ◽  
Vol 2 (28) ◽  
pp. 5695-5703 ◽  
Author(s):  
Eun Jin Bae ◽  
Young Hun Kang ◽  
Mijeong Han ◽  
Changjin Lee ◽  
Song Yun Cho
Keyword(s):  
Thin Film ◽  
Low Temperatures ◽  
Thin Film Transistors ◽  
High Performance ◽  
Gate Dielectrics ◽  
Solution Process ◽  
The Self ◽  
Oxide Thin Film ◽  
Combustion Chemistry ◽  
Metal Oxide Thin Film

We report the fabrication of high-performance metal oxide thin-film transistors (TFTs) with AlOx gate dielectrics using combustion chemistry in a solution process to provide energy to convert oxide precursors into oxides at low temperatures.

All-sputtered oxide thin-film transistors fabricated at 150 °C using simultaneous ultraviolet and thermal treatment

2018 ◽  
Vol 6 (2) ◽  
pp. 249-256 ◽  
Author(s):  
Young Jun Tak ◽  
Si Joon Kim ◽  
Sera Kwon ◽  
Hee jun Kim ◽  
Kwun-Bum Chung ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Treatment ◽  
Low Temperatures ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Oxide Tft

An all-sputtered oxide TFT process combined with simultaneous ultraviolet and thermal (SUT) treatment for consecutive fabrication processes at low temperatures.

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