Electrical characterization of rapid thermal nitrided and reoxidized plasma‐enhanced chemical‐vapor‐deposited silicon dioxide metal‐oxide‐silicon structures

1994 ◽  
Vol 76 (12) ◽  
pp. 7985-7989 ◽  
Author(s):  
S. S. Ang ◽  
Y. J. Shi ◽  
W. D. Brown
Keyword(s):  
Metal Oxide ◽  
Silicon Dioxide ◽  
Electrical Characterization ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited ◽  
Silicon Structures ◽  
Metal Oxide Silicon

Electrical Characterization of Silicon Dioxide Thin Film Prepared by ArF Excimer Laser Chemical Vapor Deposition from Silicon Tetraacetate

1997 ◽  
Vol 36 (Part 2, No. 2A) ◽  
pp. L150-L153 ◽  
Author(s):  
Atsushi Maruyama ◽  
Kazuhiro Nakata ◽  
Ken Yukimura ◽  
Toshiro Maruyama
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Silicon Dioxide ◽  
Excimer Laser ◽  
Vapor Deposition ◽  
Electrical Characterization ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Arf Excimer Laser

X‐ray diffraction study and electrical characterization of boron‐implanted low‐pressure chemical vapor deposited polycrystalline silicon layers

1984 ◽  
Vol 56 (10) ◽  
pp. 2751-2761 ◽  
Author(s):  
M. Hendriks ◽  
R. Delhez ◽  
Th. H. de Keijser ◽  
S. Radelaar ◽  
F. H. P. M. Habraken ◽  
...  
Keyword(s):  
Diffraction Study ◽  
Polycrystalline Silicon ◽  
Electrical Characterization ◽  
Chemical Vapor ◽  
Low Pressure ◽  
X Ray Diffraction ◽  
X Ray ◽  
Chemical Vapor Deposited ◽  
Pressure Chemical

Suppression and characterization of interface states at low-pressure-chemical-vapor-deposited SiN /III-nitride heterostructures

2021 ◽  
Vol 542 ◽  
pp. 148530
Author(s):  
Kexin Deng ◽  
Xinhua Wang ◽  
Sen Huang ◽  
Haibo Yin ◽  
Jie Fan ◽  
...  
Keyword(s):  
Chemical Vapor ◽  
Low Pressure ◽  
Interface States ◽  
Chemical Vapor Deposited ◽  
Pressure Chemical

Characterization of chlorinated chemical vapor deposited and natural (100) diamond

1999 ◽  
Vol 425 (2-3) ◽  
pp. 245-258 ◽  
Author(s):  
J.A. Chaney ◽  
C.S. Feigerle
Keyword(s):  
Chemical Vapor ◽  
Chemical Vapor Deposited
Sign in / Sign up

Export Citation Format

Share Document