Refractive index of III-metal-polar and N-polar AlGaN waveguides grown by metal organic chemical vapor deposition

2013 ◽  
Vol 102 (22) ◽  
pp. 221106 ◽  
Author(s):  
Martin Rigler ◽  
Marko Zgonik ◽  
Marc P. Hoffmann ◽  
Ronny Kirste ◽  
Milena Bobea ◽  
...  
2000 ◽  
Vol 616 ◽  
Author(s):  
Jeong-Hoon Park ◽  
Woon-Jo Cho ◽  
Kug-Sun Hong

AbstractTiO2 thin films were deposited by metal-organic chemical vapor deposition (MOCVD) method using titanium tetraisopropoxide(TTIP). A drastic change in structural aspect and its property occurred when the deposition temperature increased above 400°C. Deposition kinetics was proved to transit from reaction controlled regime into diffusion controlled regime above about 400°C in Arrehnius plot. In X-ray diffraction (XRD)and infrared reflectance spectra, it was observed that the crystallinity was decreased significantly around 400°C. The surface microstructure has changed explicitly from dense structure with larger grains to porous one with smaller grains observed by scanning electron microscopy and transmission electron microscopy. Electrical resistance of the films jumped by 2 orders of magnitude, which is measured by the 4-point probe method. The refractive index calculated by Swanepoel's method has decreased from 2.45 to 2.28 at 630nm. The porous microstructure of films deposited at above 400°C was thought to be responsible for the significant decrease in electrical conductivity and refractive index of the films.


1994 ◽  
Vol 341 ◽  
Author(s):  
C. M. Foster ◽  
Z. Li ◽  
G. R. Bai ◽  
H. You ◽  
D. Guo ◽  
...  

AbstractEpitaxial PbTiOM3 films were prepared by metal-organic chemical vapor deposition (MOCVD) on MgO(001), SrTiO3 (001) and LaAlO3 (001) surfaces. Four-circle X-ray diffraction and optical waveguiding experiments were performed to characterize the deposited films. The films on all three substrates were single-crystal; however, the domain structure of the films was strongly dependent on the substrate material. Films on MgO and LaAlO3 substrates showed a large amount of 90° domain structures, whereas, the degree of twinning was greatly suppressed for films on SrTiO3. The refractive indices and optical birefringence of the films were measured as a function of wavelength using the film-prism coupling method. We found that for films on LaAlO3 (001), the ordinary index and for films on MgO(001) both the ordinary and extraordinary refractive indices were higher than those of bulk single-crystal PbTiO3. For films grown on SrTiO3 (001), the ordinary refractive index was very close to that of single crystal PbTiO3. We correlate the increased refractive index and the reduced birefringence to the degree of epitaxial strain and twinning in the samples, respectively.


2021 ◽  
Vol 15 (6) ◽  
pp. 2170024
Author(s):  
Yuxuan Zhang ◽  
Zhaoying Chen ◽  
Kaitian Zhang ◽  
Zixuan Feng ◽  
Hongping Zhao

ACS Nano ◽  
2020 ◽  
Author(s):  
Assael Cohen ◽  
Avinash Patsha ◽  
Pranab K. Mohapatra ◽  
Miri Kazes ◽  
Kamalakannan Ranganathan ◽  
...  

2021 ◽  
Vol 118 (16) ◽  
pp. 162109
Author(s):  
Esmat Farzana ◽  
Fikadu Alema ◽  
Wan Ying Ho ◽  
Akhil Mauze ◽  
Takeki Itoh ◽  
...  

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