Single-mode SiON/SiO2/Si optical waveguides prepared by plasma-enhanced chemical vapor deposition
Keyword(s):
1995 ◽
Vol 34
(Part 2, No. 1A)
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pp. L4-L6
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1993 ◽
2007 ◽
Vol 269
(2)
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pp. 338-345
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Keyword(s):
Keyword(s):
2005 ◽
2014 ◽
Vol 307
◽
pp. 327-332
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Keyword(s):
1999 ◽
Vol 38
(Part 1, No. 5A)
◽
pp. 2775-2778
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