Fabrication and testing of a PZT thin film high-pressure sensor

2001 ◽  
Vol 41 (1-4) ◽  
pp. 129-136 ◽  
Author(s):  
Eugene Zakar ◽  
Ronald Polcawich ◽  
Madan Dubey ◽  
Brett Piekarski ◽  
G. Mclane ◽  
...  
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Pressure Sensor ◽  
Pzt Thin Film

scholarly journals A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement

Sensors ◽  
2018 ◽  
Vol 18 (3) ◽  
pp. 736 ◽  
Author(s):  
Guodong Zhang ◽  
Yulong Zhao ◽  
Yun Zhao ◽  
Xinchen Wang ◽  
Xueyong Wei ◽  
...  
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Measurement ◽  
Detonation Pressure ◽  
Ultra High Pressure

A small size high pressure sensor based on metal thin film technology

2007 ◽  
Author(s):  
A. Stoetzler ◽  
D. Dittmann ◽  
R. Henn ◽  
A. Jasenek ◽  
F. Klopf ◽  
...  
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Pressure Sensor ◽  
Thin Film Technology ◽  
Metal Thin Film

Study on the Shockwave Pressure Testing Method for Detonating Cords

2008 ◽  
Author(s):  
Ying-Wei Bai ◽  
Zhuang-De Jiang ◽  
Yu-Long Zhao ◽  
En-Yi Chu ◽  
Kexuan Wang
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Pressure Sensor ◽  
The Other ◽  
Standard Testing ◽  
Pressure Testing ◽  
Testing Method ◽  
Output Performance ◽  
Explosive Devices

When detonation cords are used in explosive trains such as explosive circuits, the output performance can be obtained by destructive tests of matching samples from common production lots. In this paper the shockwave pressure testing method for Detonating Cords is studied. Two types of sensors are used to test the shockwave pressure. One is a thin film Mn-Cu sensor which is a standard testing method for output performance of explosive devices. The other sensor is a high pressure sensor with a microcircuit in it; this sensor can be used many times. The testing results are verified in the detonation equation.

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Fouling Is the Beginning: Upcycling Biopolymer-Fouled Substrates for Fabricating High-Permeance Thin-Film Composite Polyamide Membranes

2020 ◽  
Author(s):  
Ruobin Dai ◽  
Hongyi Han ◽  
Tianlin Wang ◽  
Jiayi Li ◽  
Chuyang Y. Tang ◽  
...  
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
End Of Life ◽  
Water Purification ◽  
Low Pressure ◽  
Polymeric Membranes ◽  
Membrane Recycling ◽  
Film Composite ◽  
Thin Film Composite ◽  
First Time

Commercial polymeric membranes are generally recognized to have low sustainability as membranes need to be replaced and abandoned after reaching the end of their life. At present, only techniques for downcycling end-of-life high-pressure membranes are available. For the first time, this study paves the way for upcycling fouled/end-of-life low-pressure membranes to fabricate new high-pressure membranes for water purification, forming a closed eco-loop of membrane recycling with significantly improved sustainability.

Piezoelectric PZT thin-film transformers with a ring–dot structure

2020 ◽  
Vol 59 (SP) ◽  
pp. SPPD09
Author(s):  
Sang-Hyo Kweon ◽  
Kazuki Tani ◽  
Kensuke Kanda ◽  
Sahn Nahm ◽  
Isaku Kanno
Keyword(s):  
Thin Film ◽  
Pzt Thin Film

scholarly journals Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Original Model ◽  
Ansys Software ◽  
Nonlinear Error ◽  
Sensor Model ◽  
Optimized Model ◽  
Simulation Results ◽  
Better Than

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.

scholarly journals A Theoretical Study on an Elastic Polymer Thin Film-Based Capacitive Wind-Pressure Sensor

Polymers ◽  
2020 ◽  
Vol 12 (9) ◽  
pp. 2133
Author(s):  
Xue Li ◽  
Jun-Yi Sun ◽  
Bin-Bin Shi ◽  
Zhi-Hang Zhao ◽  
Xiao-Ting He
Keyword(s):  
Thin Film ◽  
Closed Form ◽  
Pressure Sensor ◽  
Closed Form Solution ◽  
Form Solution ◽  
Wind Pressure ◽  
Polymer Thin Film ◽  
Movable Electrode ◽  
Elastic Polymer ◽  
Electrode Plate

This study is devoted to the design of an elastic polymer thin film-based capacitive wind-pressure sensor to meet the anticipated use for real-time monitoring of structural wind pressure in civil engineering. This sensor is composed of four basic units: lateral elastic deflection unit of a wind-driven circular polymer thin film, parallel plate capacitor with a movable circular electrode plate, spring-driven return unit of the movable electrode plate, and dielectric materials between electrode plates. The capacitance of the capacitor varies with the parallel move of the movable electrode plate which is first driven by the lateral elastic deflection of the wind-driven film and then is, after the wind pressure is reduced or eliminated, returned quickly by the drive springs. The closed-form solution for the contact problem between the wind-driven thin film and the spring-driven movable electrode plate is presented, and its reliability is proved by the experiment conducted. The numerical examples conducted show that it is workable that by using the numerical calibration based on the presented closed-form solution the proposed sensor is designed into a nonlinear sensor with larger pressure-monitoring range and faster response speed than the linear sensor usually based on experimental calibration.

Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film

2009 ◽  
Vol 421-422 ◽  
pp. 95-98
Author(s):  
Tsuyoshi Aoki ◽  
Shigeyoshi Umemiya ◽  
Masaharu Hida ◽  
Kazuaki Kurihara
Keyword(s):  
Thin Film ◽  
Fem Analysis ◽  
Active Part ◽  
Piezoelectric Response ◽  
Small Displacement ◽  
Shear Mode ◽  
Mems Devices ◽  
Pzt Film ◽  
Pzt Thin Film ◽  
Piezoelectric Constants

Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.

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