Atomic force microscope for direct comparison measurement of step height and crystalline lattice spacing

1999 ◽  
Vol 10 (4) ◽  
pp. 380-384 ◽  
Author(s):  
Toru Fujii ◽  
Katsuhiko Imabori ◽  
Hideki Kawakatsu ◽  
Shunji Watanabe ◽  
Hannes Bleuler
Keyword(s):  
Atomic Force Microscope ◽  
Lattice Spacing ◽  
Step Height ◽  
Crystalline Lattice ◽  
Atomic Force ◽  
Comparison Measurement

Atomic force microscope for direct comparison measurement of step height and crystalline lattice spacing

2000 ◽  
Vol 11 (1) ◽  
pp. 45-45
Author(s):  
T Fujii ◽  
K Imabori ◽  
H Kawakatsu ◽  
S Watanabe ◽  
H Bleuler
Keyword(s):  
Atomic Force Microscope ◽  
Lattice Spacing ◽  
Step Height ◽  
Crystalline Lattice ◽  
Atomic Force ◽  
Comparison Measurement

scholarly journals Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode / Im Tapping-Modus betriebenes Rasterkraftmikroskop mit einstellbarer Antastrichtung und piezoresistiven Cantilevern

2019 ◽  
Vol 86 (s1) ◽  
pp. 12-16
Author(s):  
Janik Schaude ◽  
Julius Albrecht ◽  
Ute Klöpzig ◽  
Andreas C. Gröschl ◽  
Tino Hausotte
Keyword(s):  
Atomic Force Microscope ◽  
Metrological Traceability ◽  
Step Height ◽  
Tapping Mode ◽  
Atomic Force ◽  
In Situ Calibration ◽  
Measuring Machine ◽  
Piezoresistive Cantilevers

AbstractThis article presents a new tilting atomic force microscope (AFM) with an adjustable probe direction and piezoresistive cantilever operated in tapping-mode. The AFM is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The whole setup is integrated into a nano measuring machine (NMM-1) and the metrological traceability of the piezoresistive cantilever is warranted by in situ calibration on the NMM-1. To demonstrate the capabilities of the tilting AFM, measurements were conducted on a step height standard.

scholarly journals Metrological atomic force microscope and traceable measurement of nano-dimension structures

ACTA IMEKO ◽  
2013 ◽  
Vol 2 (1) ◽  
pp. 12 ◽  
Author(s):  
Sitian Gao ◽  
Mingzhen Lu ◽  
Wei Li ◽  
Yushu Shi ◽  
Qi Li
Keyword(s):  
Atomic Force Microscope ◽  
Line Width ◽  
Semiconductor Industry ◽  
Step Height ◽  
Optical Instrument ◽  
Font Size ◽  
Height Measurement ◽  
Dimensional Measurement ◽  
Atomic Force ◽  
Width Measurement

<span style="font-family: &quot;Times New Roman&quot;; font-size: 10pt; mso-fareast-font-family: 宋体; mso-ansi-language: EN-GB; mso-fareast-language: ZH-CN; mso-bidi-language: AR-SA; mso-bidi-font-size: 12.0pt;" lang="EN-GB">The quantity assurance in semiconductor industry development requires dimensional measurement with nanometer accuracy. A metrological AFM is designed to establish a traceable standard with nanometer uncertainty. The principle and design of the instrument is introduced in this paper. The displacement of the sample is traced to the SI unit by interferometers. The metrological AFM is applied to step height and line width measurement. The results are compared with optical instrument and profilometer. The metrological AFM is used to step height measurement in an international comparison and the result shows an uncertainty less than </span><span style="font-family: &quot;Times New Roman&quot;; font-size: 10pt; mso-fareast-font-family: 宋体; mso-ansi-language: EN-CA; mso-fareast-language: ZH-CN; mso-bidi-language: AR-SA; mso-bidi-font-size: 12.0pt;" lang="EN-CA">2 nm. The application of metrological AFM in line width and pitch are also introduced.</span>

Determination of Corner Positions for Calculation of Step Height of Atomic Force Microscope Images Based on ISO 5436-1

2013 ◽  
Vol 19 (3) ◽  
pp. 769-774 ◽  
Author(s):  
Adedayo S. Adebayo ◽  
Zhao Xuezeng ◽  
Wang Weijie
Keyword(s):  
Atomic Force Microscopy ◽  
Atomic Force Microscope ◽  
Step Height ◽  
Height Measurement ◽  
Force Microscopy ◽  
Atomic Force ◽  
Microscope Images ◽  
Image Metrology ◽  
Vertical Spacing

AbstractStep height is defined as the vertical spacing between two plane-parallel planes comprising an elevation or an indentation and the substrate. In atomic force microscopy (AFM), there are many algorithms for determining feature dimensions such as step height and width. One common problem of many algorithms is the difficulty for users to accurately determine the corner positions needed to properly implement the said algorithms. A new algorithm based on ISO 5436-1 is proposed that determines the necessary corner positions along with two examples illustrating the implementation of this algorithm. We propose calling this new method the determinant method. Since the corner positions are automatically decided, feature dimensions such as step height of an AFM image are easily determined. Comparative experiments carried out to compare the step height measurement using this algorithm and the SPIP software from Image Metrology show encouraging results.

Characterization of photosystem II with the atomic-force microscope

1992 ◽  
Vol 50 (2) ◽  
pp. 1146-1147
Author(s):  
Kathleen M. Marr ◽  
Mary K. Lyon
Keyword(s):  
Photosystem Ii ◽  
Atomic Force Microscope ◽  
Three Dimensional ◽  
Biologically Active ◽  
Atomic Force ◽  
Freeze Etching ◽  
Image Averaging ◽  
Oxygen Evolving ◽  
Averaging Techniques

Photosystem II (PSII) is different from all other reaction centers in that it splits water to evolve oxygen and hydrogen ions. This unique ability to evolve oxygen is partly due to three oxygen evolving polypeptides (OEPs) associated with the PSII complex. Freeze etching on grana derived insideout membranes revealed that the OEPs contribute to the observed tetrameric nature of the PSIl particle; when the OEPs are removed, a distinct dimer emerges. Thus, the surface of the PSII complex changes dramatically upon removal of these polypeptides. The atomic force microscope (AFM) is ideal for examining surface topography. The instrument provides a topographical view of individual PSII complexes, giving relatively high resolution three-dimensional information without image averaging techniques. In addition, the use of a fluid cell allows a biologically active sample to be maintained under fully hydrated and physiologically buffered conditions. The OEPs associated with PSII may be sequentially removed, thereby changing the surface of the complex by one polypeptide at a time.

Imaging polymers, proteins and dna in aqueous solutions with the atomic force microscope

1989 ◽  
Vol 47 ◽  
pp. 32-33
Author(s):  
S.A.C. Gould ◽  
B. Drake ◽  
C.B. Prater ◽  
A.L. Weisenhorn ◽  
S.M. Lindsay ◽  
...  
Keyword(s):  
Amino Acids ◽  
Dna Sequencing ◽  
Aqueous Solutions ◽  
Atomic Force Microscope ◽  
Piezoelectric Crystal ◽  
Atomic Force ◽  
Structure Of Molecules ◽  
Optical Lever

The atomic force microscope (AFM) is an instrument that can be used to image many samples of interest in biology and medicine. Images of polymerized amino acids, polyalanine and polyphenylalanine demonstrate the potential of the AFM for revealing the structure of molecules. Images of the protein fibrinogen which agree with TEM images demonstrate that the AFM can provide topographical data on larger molecules. Finally, images of DNA suggest the AFM may soon provide an easier and faster technique for DNA sequencing.The AFM consists of a microfabricated SiO2 triangular shaped cantilever with a diamond tip affixed at the elbow to act as a probe. The sample is mounted on a electronically driven piezoelectric crystal. It is then placed in contact with the tip and scanned. The topography of the surface causes minute deflections in the 100 μm long cantilever which are detected using an optical lever.

The atomic-force microscope and its future in biology

1993 ◽  
Vol 51 ◽  
pp. 704-705
Author(s):  
Jean-Paul Revel
Keyword(s):  
Silicon Nitride ◽  
Laser Beam ◽  
Atomic Force Microscope ◽  
Scanning Tunneling Microscope ◽  
Point Of View ◽  
Scanning Tunneling ◽  
Close Relative ◽  
Tunneling Microscope ◽  
Atomic Force ◽  
Sharp Point

The last few years have been marked by a series of remarkable developments in microscopy. Perhaps the most amazing of these is the growth of microscopies which use devices where the place of the lens has been taken by probes, which record information about the sample and display it in a spatial from the point of view of the context. From the point of view of the biologist one of the most promising of these microscopies without lenses is the scanned force microscope, aka atomic force microscope.This instrument was invented by Binnig, Quate and Gerber and is a close relative of the scanning tunneling microscope. Today's AFMs consist of a cantilever which bears a sharp point at its end. Often this is a silicon nitride pyramid, but there are many variations, the object of which is to make the tip sharper. A laser beam is directed at the back of the cantilever and is reflected into a split, or quadrant photodiode.

Sign in / Sign up

Export Citation Format

Share Document