Characterization of the squeeze film damping effect on the quality factor of a microbeam resonator

2004 ◽  
Vol 14 (10) ◽  
pp. 1302-1306 ◽  
Author(s):  
C Zhang ◽  
G Xu ◽  
Q Jiang
Keyword(s):  
Quality Factor ◽  
Squeeze Film ◽  
Damping Effect ◽  
Squeeze Film Damping

Squeeze film damping effect on the dynamic response of a MEMS torsion mirror

1998 ◽  
Vol 8 (3) ◽  
pp. 200-208 ◽  
Author(s):  
Feixia Pan ◽  
Joel Kubby ◽  
Eric Peeters ◽  
Alex T Tran ◽  
Subrata Mukherjee
Keyword(s):  
Dynamic Response ◽  
Squeeze Film ◽  
Damping Effect ◽  
Squeeze Film Damping

scholarly journals Squeeze Film Damping Effect on Different Microcantilever Probes in Tapping Mode Atomic Force Microscope

Scanning ◽  
2020 ◽  
Vol 2020 ◽  
pp. 1-6
Author(s):  
Yan Sun ◽  
Jing Liu ◽  
Kejian Wang ◽  
Zheng Wei
Keyword(s):  
Atomic Force Microscope ◽  
Theoretical Models ◽  
Sample Surface ◽  
Squeeze Film ◽  
Simplified Models ◽  
Tapping Mode ◽  
Damping Effect ◽  
Atomic Force ◽  
Squeeze Film Damping

During the operation of tapping mode atomic force microscope (TM-AFM), the gap between the cantilever and sample surface is very small (several nanometers to micrometers). Owing to the small gap distance and high vibration frequency, squeeze film force should be considered in TM-AFM. To explore the mechanism of squeeze film damping in TM-AFM, three theoretical microcantilever simplified models are discussed innovatively herein: tip probe, ball probe, and tipless probe. Experiments and simulations are performed to validate the theoretical models. It is of great significance to improve the image quality of atomic force microscope.

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