Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films

2014 ◽  
Vol 24 (6) ◽  
pp. 065021 ◽  
Author(s):  
J N Westwood ◽  
V T K Sauer ◽  
J K Kwan ◽  
W K Hiebert ◽  
J C Sit
Keyword(s):  
Thin Films ◽  
Surface Area ◽  
High Surface ◽  
High Surface Area ◽  
Glancing Angle Deposition ◽  
Nanoelectromechanical Systems ◽  
Glancing Angle ◽  
Angle Deposition

Thin films with nanometer-scale pillar microstructure

1999 ◽  
Vol 14 (7) ◽  
pp. 3158-3163 ◽  
Author(s):  
K. Robbie ◽  
C. Shafai ◽  
M. J. Brett
Keyword(s):  
Thin Films ◽  
Incident Angle ◽  
High Surface ◽  
High Surface Area ◽  
Glancing Angle Deposition ◽  
Vapor Flux ◽  
Substrate Rotation ◽  
Glancing Angle ◽  
Glad Technique ◽  
Columnar Thin Film

Thin films possessing microstructure composed of isolated vertical pillars were deposited by glancing angle deposition (GLAD) without the need for subsequent etch processing. The GLAD technique uses substrate rotation and oblique angle flux incidence to deposit a porous columnar thin film with engineered microstructures. Thin films with a pillar microstructure were fabricated from a variety of metals, metal oxides and fluorides, and semiconductors. The rate and incident angle of vapor flux, as well as the substrate rotation speed during deposition, were found to critically affect pillar microstructure. Thin films with pillar diameters and densities as low as 30 nm and 3 pillars per μm2, respectively, were deposited. The low stress, high surface area, and porous nature of these films suggests use of pillar microstructure films in optical, chemical, biological, mechanical, magnetic, and electrical applications.

Hierarchical 3D-flower-like CuO nanostructure on copper foil for supercapacitors

RSC Advances ◽  
2015 ◽  
Vol 5 (6) ◽  
pp. 4443-4447 ◽  
Author(s):  
S. K. Shinde ◽  
D. P. Dubal ◽  
G. S. Ghodake ◽  
V. J. Fulari
Keyword(s):  
Thin Films ◽  
Surface Area ◽  
Copper Foil ◽  
High Surface ◽  
High Surface Area ◽  
Cuo Nanostructure

We present a novel route for the synthesis of CuO thin films. The nano-flower like nanostructures provide high surface area, and the CuO shows excellent supercapacitive properties.

scholarly journals Microstructure-Induced Anisotropic Optical Properties of YF3 Columnar Thin Films Prepared by Glancing Angle Deposition

Nanomaterials ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 2413
Author(s):  
Yao Shan ◽  
Pian Liu ◽  
Yao Chen ◽  
Haotian Zhang ◽  
Huatian Tu ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Volume Fraction ◽  
Electron Beam Evaporation ◽  
Glancing Angle Deposition ◽  
Refractive Indices ◽  
Glancing Angle ◽  
Axis Parallel ◽  
Angle Deposition ◽  
Deposition Angle

Yttrium fluoride (YF3) columnar thin films (CTFs) were fabricated by electron beam evaporation with the glancing angle deposition method. The microstructures and optical properties of YF3 CTFs were studied systematically. The YF3 films grown at different deposition angles are all amorphous. As the deposition angle increases, the columns in YF3 CTFs become increasingly separated and inclined, and the volume fraction of YF3 decreases, resulting in lower refractive indices. This phenomenon is attributed to the self-shadowing effect and limited adatom diffusion. The YF3 CTFs are optically biaxial anisotropic with the long axis (c-axis) parallel to the columns, the short axis (b-axis) perpendicular to the columns, and the other axis (a-axis) parallel to the film interface. The principal refractive index along the b-axis for the 82°-deposited sample is approximately 1.233 at 550 nm. For the 78°-deposited sample, the differences of principal refractive indices between the c-axis and the b-axis and between the a-axis and the b-axis reach the maximum 0.056 and 0.029, respectively. The differences of principal refractive indices were affected by both the deposition angle and the volume fraction of YF3.

Defect Chemistry of Oxide Nanomaterials with High Surface Area: Ordered Mesoporous Thin Films of the Oxygen Storage Catalyst CeO2–ZrO2

ACS Nano ◽  
2013 ◽  
Vol 7 (4) ◽  
pp. 2999-3013 ◽  
Author(s):  
Pascal Hartmann ◽  
Torsten Brezesinski ◽  
Joachim Sann ◽  
Andriy Lotnyk ◽  
Jens-Peter Eufinger ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Area ◽  
High Surface ◽  
High Surface Area ◽  
Defect Chemistry ◽  
Oxygen Storage ◽  
Ordered Mesoporous ◽  
Mesoporous Thin Films ◽  
Storage Catalyst
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