An application of impediography to the high sensitivity and high resolution identification of structural damage

2015 ◽  
Vol 24 (6) ◽  
pp. 065044 ◽  
Author(s):  
L Zhao ◽  
J Yang ◽  
K W Wang ◽  
F Semperlotti
Author(s):  
Kazumichi Ogura ◽  
Michael M. Kersker

Backscattered electron (BE) images of GaAs/AlGaAs super lattice structures were observed with an ultra high resolution (UHR) SEM JSM-890 with an ultra high sensitivity BE detector. Three different types of super lattice structures of GaAs/AlGaAs were examined. Each GaAs/AlGaAs wafer was cleaved by a razor after it was heated for approximately 1 minute and its crosssectional plane was observed.First, a multi-layer structure of GaAs (100nm)/AlGaAs (lOOnm) where A1 content was successively changed from 0.4 to 0.03 was observed. Figures 1 (a) and (b) are BE images taken at an accelerating voltage of 15kV with an electron beam current of 20pA. Figure 1 (c) is a sketch of this multi-layer structure corresponding to the BE images. The various layers are clearly observed. The differences in A1 content between A1 0.35 Ga 0.65 As, A1 0.4 Ga 0.6 As, and A1 0.31 Ga 0.69 As were clearly observed in the contrast of the BE image.


Author(s):  
M. Pan

It has been known for many years that materials such as zeolites, polymers, and biological specimens have crystalline structures that are vulnerable to electron beam irradiation. This radiation damage severely restrains the use of high resolution electron microscopy (HREM). As a result, structural characterization of these materials using HREM techniques becomes difficult and challenging. The emergence of slow-scan CCD cameras in recent years has made it possible to record high resolution (∽2Å) structural images with low beam intensity before any apparent structural damage occurs. Among the many ideal properties of slow-scan CCD cameras, the low readout noise and digital recording allow for low-dose HREM to be carried out in an efficient and quantitative way. For example, the image quality (or resolution) can be readily evaluated on-line at the microscope and this information can then be used to optimize the operating conditions, thus ensuring that high quality images are recorded. Since slow-scan CCD cameras output (undistorted) digital data within the large dynamic range (103-104), they are ideal for quantitative electron diffraction and microscopy.


2006 ◽  
Vol 23 (9) ◽  
pp. 2415-2417
Author(s):  
Deng Lun-Hua ◽  
Gao Xiao-Ming ◽  
Cao Zhen-Song ◽  
Zhao Wei-Xiong ◽  
Zhang Wei-Jun

2021 ◽  
Author(s):  
Xin Xu ◽  
Zongren Dai ◽  
Yifang Wang ◽  
Mingfang Li ◽  
Yidong Tan

<div> <p>An optical rotary sensor based on laser self-mixing interferometry is proposed, which enables noncontact and full-circle rotation measurement of non-cooperative targets with high resolution and sensitivity. The prototype demonstrates that the resolution is 0.1μrad and the linearity is 2.33×10<sup>-4</sup>. Stability of the prototype is 2μrad over 3600s and the repeatability error is below 0.84°under 9-gruop full-circle tests. The theoretical resolution reaches up to 16nrad. Random rotation has been successfully traced with a bionic hand to simulate the tremor process. Error analysis and limitation discussion have been also carried out in the paper. Although the accuracy needs further improvement compared with the best rotary sensor, this method has its unique advantages of non-cooperative target sensing, high sensitivity and electromagnetic immunity. Hence, the optical rotary sensor provides a promising alternative in precise rotation measurement, tremor tracing and nano-motion monitoring.</p> </div> <b><br></b>


Sign in / Sign up

Export Citation Format

Share Document