Low-temperature plasma enhanced atomic layer deposition of large area HfS2 nanocrystal thin films
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2014 ◽
Vol 2
(12)
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pp. 2123-2136
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2010 ◽
Vol 157
(7)
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pp. P66
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2019 ◽
Vol 45
(6)
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pp. 7407-7412
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Keyword(s):
2018 ◽
Vol 6
(24)
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pp. 6471-6482
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