Epitaxial growth of β-FeSi2thin films on Si(111) substrates by radio frequency magnetron sputtering and their application to near-infrared photodetection

2016 ◽  
Vol 55 (6S2) ◽  
pp. 06HC03 ◽  
Author(s):  
Nathaporn Promros ◽  
Ryuji Baba ◽  
Motoki Takahara ◽  
Tarek M. Mostafa ◽  
Phongsaphak Sittimart ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Epitaxial Growth ◽  
Near Infrared ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Infrared Photodetection

Epitaxial growth of ZnO on GaN/sapphire substrate by radio-frequency magnetron sputtering

2010 ◽  
Vol 31 (9) ◽  
pp. 093001 ◽  
Author(s):  
Yang Xiaoli ◽  
Chen Nuofu ◽  
Yin Zhigang ◽  
Zhang Xingwang ◽  
Li Yang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Epitaxial Growth ◽  
Sapphire Substrate ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Deposition of a conductive near-infrared cutoff filter by radio-frequency magnetron sputtering

2002 ◽  
Vol 41 (16) ◽  
pp. 3061 ◽  
Author(s):  
Jang-Hoon Lee ◽  
Seung-Hyu Lee ◽  
Kwang-Lim Yoo ◽  
Nam-Young Kim ◽  
Chang Kwon Hwangbo
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Near Infrared ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Infrared Cutoff ◽  
Cutoff Filter

scholarly journals Tungsten oxide films by radio-frequency magnetron sputtering for near-infrared photonics

2021 ◽  
pp. 100093
Author(s):  
Hao Chen ◽  
Alessandro Chiasera ◽  
Stefano Varas ◽  
Osman Sayginer ◽  
Cristina Armellini ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Tungsten Oxide ◽  
Near Infrared ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Epitaxial growth of Cu2ZnSnS4 thin film on Si by radio frequency magnetron sputtering

2020 ◽  
Vol 116 (12) ◽  
pp. 123901 ◽  
Author(s):  
Ning Song ◽  
Martin A. Green ◽  
Kaiwen Sun ◽  
Yicong Hu ◽  
Chang Yan ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Epitaxial Growth ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2znsns4 Thin Film
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