scholarly journals Design of a liquid-phase magnetron sputtering small-sized source for the vacuum coating system MVTU-11-1MS

2021 ◽  
Vol 1799 (1) ◽  
pp. 012016
Author(s):  
A D Kouptsov ◽  
D D Vasilev ◽  
S V Sidorova ◽  
K M Moiseev
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Coating System

Energy and substance transfer in magnetron sputtering systems with liquid-phase target

Vacuum ◽  
2016 ◽  
Vol 124 ◽  
pp. 11-17 ◽  
Author(s):  
G.A. Bleykher ◽  
V.P. Krivobokov ◽  
A.V. Yurjeva ◽  
I. Sadykova
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Substance Transfer

Technological Features of the Thick Tin Film Deposition by with Magnetron Sputtering Form Liquid-Phase Target

2018 ◽  
Vol 781 ◽  
pp. 8-13 ◽  
Author(s):  
Mariya Makarova ◽  
Konstantin Moiseev ◽  
Alexander Nazarenko ◽  
Petr Luchnikov ◽  
Galina Dalskaya ◽  
...  
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Deposition Rate ◽  
Amorphous Structure ◽  
Film Deposition ◽  
High Deposition Rate ◽  
Crucible Material ◽  
Tin Films ◽  
X Ray ◽  
Tin Film

Technological features of obtaining of tin films in a vacuum by liquid-phase target magnetron sputtering were reviewed. With high deposition rate the white color tin coating with amorphous structure is formed on the substrate. X-ray microanalysis of the obtained tin films showed the presence of micro-and nanoparticles of an impurity of the crucible material in the structure of the films. The use of the tantalum crucible with liquid-phase target magnetron sputtering with deposition rate of 3.2 μm / min allows obtaining ultra-pure, continuous, homogeneous tin film on a stationary substrate without impurity material of the crucible.

Specifics of magnetron sputtering of lithium from liquid-phase target

Vacuum ◽  
2019 ◽  
Vol 168 ◽  
pp. 108816
Author(s):  
S.E. Mochalov ◽  
A.R. Nurgaliev ◽  
E.V. Kuzmina ◽  
A.L. Ivanov ◽  
V.S. Kolosnitsyn
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering

scholarly journals Optical Properties of Ta2O5/SiO2 Antireflection Coating System

2011 ◽  
Vol 2-3 ◽  
pp. 167-171
Author(s):  
Shao Ni Sun ◽  
Li Yang Xie ◽  
Yi Chen Zhang ◽  
Ying Huang
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Growth Parameters ◽  
Rf Magnetron Sputtering ◽  
Antireflection Coating ◽  
Coating System ◽  
Working Pressure ◽  
Pressure Oxygen ◽  
K9 Glass

The Ta2O5/SiO2 Multi-layer Antireflection Coating Is Prepared on K9 Glass by RF Magnetron Sputtering Technology in the Experiment. the Growth Parameters Are Changed to Get Multi-layer Antireflection Film with Good Optical Properties. in the Technical Research, the Influence of Various Growth Parameters, Including Working Pressure, Oxygen Content, Substrate Temperature, Etc., on the Optical Properties and Structures of the Coatings Are Studied. Optical Properties and Morphological Features such as Surface, Structure Are Investigated by UV-VIS Spectrophotometer and AFM, Respectively. the Detecting Results Further Verify the Important Influences of Proper Growth Parameters on Optical Properties of Antireflection Coating.

scholarly journals Investigation of a small-sized source parameters for magnetron sputtering with liquid-phase target

2018 ◽  
Vol 387 ◽  
pp. 012033
Author(s):  
A A Khramova ◽  
A R Matanin ◽  
D A Polin ◽  
D D Vasil’ev ◽  
K M Moiseev
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Source Parameters

Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

Vacuum ◽  
2017 ◽  
Vol 141 ◽  
pp. 135-138 ◽  
Author(s):  
Alena V. Yuryeva ◽  
Artyom S. Shabunin ◽  
Dmitry V. Korzhenko ◽  
Olga S. Korneva ◽  
Mikhail V. Nikolaev
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Sputtering System

Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode

2009 ◽  
Vol 1159 ◽  
Author(s):  
Seunghun Lee ◽  
Igor Svadkovski ◽  
Jong-Kuk Kim ◽  
Do-Geun Kim
Keyword(s):  
Magnetron Sputtering ◽  
Coating Layer ◽  
Hybrid Coating ◽  
Hard Coatings ◽  
Vacuum Arc ◽  
Operating Pressure ◽  
Coating System ◽  
X Ray ◽  
Magnetron Sputter ◽  
Si Content

AbstractTi-Si-N nanocomposite coatings have been investigated using a hybrid coating system. The elimination of macro particles and the control of Si content should be accompanied to realize high quality of coating layer since macro particles induce corrosive reaction and the Si content of Ti-Si-N coating affects the mechanical properties such as hardness and friction coefficient. We introduced the hybrid coating system which consists of double bending filtered vacuum arc system (DBFVAS) and magnetron sputter cathode to solve two problems such as the macro particles and the control of Si content in Ti-Si-N coatings. The DBFVAS and magnetron sputter equipped with Ti cathode and Si cathode target, respectively. Ar and N2 are used for discharge and reaction gas and operating pressure is 0.6 mTorr. We confirmed that the DBFVAS reduced macro particles effectively and the Si content could be changed by controlling the applied power on magnetron sputtering cathode. The properties of Ti-Si-N coating layer are estimated by X-ray diffraction, X-ray photoelectron spectroscopy, wear test and nano indentation. And we compared Si content with Si emission (594.84 nm) of process chamber using an optical emission spectroscopy.

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