Energy and substance transfer in magnetron sputtering systems with liquid-phase target

Vacuum ◽  
2016 ◽  
Vol 124 ◽  
pp. 11-17 ◽  
Author(s):  
G.A. Bleykher ◽  
V.P. Krivobokov ◽  
A.V. Yurjeva ◽  
I. Sadykova
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Substance Transfer

Technological Features of the Thick Tin Film Deposition by with Magnetron Sputtering Form Liquid-Phase Target

2018 ◽  
Vol 781 ◽  
pp. 8-13 ◽  
Author(s):  
Mariya Makarova ◽  
Konstantin Moiseev ◽  
Alexander Nazarenko ◽  
Petr Luchnikov ◽  
Galina Dalskaya ◽  
...  
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Deposition Rate ◽  
Amorphous Structure ◽  
Film Deposition ◽  
High Deposition Rate ◽  
Crucible Material ◽  
Tin Films ◽  
X Ray ◽  
Tin Film

Technological features of obtaining of tin films in a vacuum by liquid-phase target magnetron sputtering were reviewed. With high deposition rate the white color tin coating with amorphous structure is formed on the substrate. X-ray microanalysis of the obtained tin films showed the presence of micro-and nanoparticles of an impurity of the crucible material in the structure of the films. The use of the tantalum crucible with liquid-phase target magnetron sputtering with deposition rate of 3.2 μm / min allows obtaining ultra-pure, continuous, homogeneous tin film on a stationary substrate without impurity material of the crucible.

Specifics of magnetron sputtering of lithium from liquid-phase target

Vacuum ◽  
2019 ◽  
Vol 168 ◽  
pp. 108816
Author(s):  
S.E. Mochalov ◽  
A.R. Nurgaliev ◽  
E.V. Kuzmina ◽  
A.L. Ivanov ◽  
V.S. Kolosnitsyn
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering

scholarly journals Design of a liquid-phase magnetron sputtering small-sized source for the vacuum coating system MVTU-11-1MS

2021 ◽  
Vol 1799 (1) ◽  
pp. 012016
Author(s):  
A D Kouptsov ◽  
D D Vasilev ◽  
S V Sidorova ◽  
K M Moiseev
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Coating System

scholarly journals Investigation of a small-sized source parameters for magnetron sputtering with liquid-phase target

2018 ◽  
Vol 387 ◽  
pp. 012033
Author(s):  
A A Khramova ◽  
A R Matanin ◽  
D A Polin ◽  
D D Vasil’ev ◽  
K M Moiseev
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Source Parameters

Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

Vacuum ◽  
2017 ◽  
Vol 141 ◽  
pp. 135-138 ◽  
Author(s):  
Alena V. Yuryeva ◽  
Artyom S. Shabunin ◽  
Dmitry V. Korzhenko ◽  
Olga S. Korneva ◽  
Mikhail V. Nikolaev
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Sputtering System

Elucidation of block boundaries as the dissolution channels in hydrated cement

1978 ◽  
Vol 36 (1) ◽  
pp. 484-485
Author(s):  
N.V. Belov ◽  
U.I. Papiashwili ◽  
B.E. Yudovich
Keyword(s):  
Liquid Phase ◽  
Grain Boundaries ◽  
Benzoyl Peroxide ◽  
Phase Contrast ◽  
Active Role ◽  
Point Of View ◽  
Hardened Cement ◽  
Hydrated Cement ◽  
Hardened Cement Paste

It has been almost universally adopted that dissolution of solids proceeds with development of uniform, continuous frontiers of reaction.However this point of view is doubtful / 1 /. E.g. we have proved the active role of the block (grain) boundaries in the main phases of cement, these boundaries being the areas of hydrate phases' nucleation / 2 /. It has brought to the supposition that the dissolution frontier of cement particles in water is discrete. It seems also probable that the dissolution proceeds through the channels, which serve both for the liquid phase movement and for the drainage of the incongruant solution products. These channels can be appeared along the block boundaries.In order to demonsrate it, we have offered the method of phase-contrast impregnation of the hardened cement paste with the solution of methyl metacrylahe and benzoyl peroxide. The viscosity of this solution is equal to that of water.

Identification of hepatitis a virus in cell cultures by solid phase immune electron microscopy

1986 ◽  
Vol 44 ◽  
pp. 238-239
Author(s):  
C.D. Humphrey ◽  
T.L. Cromeans ◽  
E.H. Cook ◽  
D.W. Bradley
Keyword(s):  
Electron Microscopy ◽  
Liquid Phase ◽  
Cell Cultures ◽  
Rapid Detection ◽  
Hepatitis A ◽  
Hepatitis A Virus ◽  
Solid Phase ◽  
Immune Electron Microscopy ◽  
Detection And Identification

There is a variety of methods available for the rapid detection and identification of viruses by electron microscopy as described in several reviews. The predominant techniques are classified as direct electron microscopy (DEM), immune electron microscopy (IEM), liquid phase immune electron microscopy (LPIEM) and solid phase immune electron microscopy (SPIEM). Each technique has inherent strengths and weaknesses. However, in recent years, the most progress for identifying viruses has been realized by the utilization of SPIEM.

Microanalysis of silicate glass films grown on α-Al2O3 by pulsed-laser deposition

1993 ◽  
Vol 51 ◽  
pp. 438-439
Author(s):  
Michael P. Mallamaci ◽  
James Bentley ◽  
C. Barry Carter
Keyword(s):  
Liquid Phase ◽  
Single Crystal ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Ceramic Materials ◽  
Laser Deposition ◽  
Triple Junctions ◽  
Ion Milling ◽  
Multicomponent Oxides ◽  
Glass Films

Glass-oxide interfaces play important roles in developing the properties of liquid-phase sintered ceramics and glass-ceramic materials. Deposition of glasses in thin-film form on oxide substrates is a potential way to determine the properties of such interfaces directly. Pulsed-laser deposition (PLD) has been successful in growing stoichiometric thin films of multicomponent oxides. Since traditional glasses are multicomponent oxides, there is the potential for PLD to provide a unique method for growing amorphous coatings on ceramics with precise control of the glass composition. Deposition of an anorthite-based (CaAl2Si2O8) glass on single-crystal α-Al2O3 was chosen as a model system to explore the feasibility of PLD for growing glass layers, since anorthite-based glass films are commonly found in the grain boundaries and triple junctions of liquid-phase sintered α-Al2O3 ceramics.Single-crystal (0001) α-Al2O3 substrates in pre-thinned form were used for film depositions. Prethinned substrates were prepared by polishing the side intended for deposition, then dimpling and polishing the opposite side, and finally ion-milling to perforation.

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