Modeling of Lithium Niobate (LiNbO3) and Aluminum Nitride (AlN) Nanowires Using Comsol Multiphysics Software: The Case of Pressure Sensor

A biocompatible liquid crystal polymer (LCP) pressure sensor is proposed for measuring intracranial pressure (ICP) in Traumatic Brain Injury (TBI) patients. Finite element method using COMSOL multiphysics is employed to study the mechanical behavior of the packaged LCP pressure sensor in order to optimize the sensor design. A 3D model of the 8x8x0.2 mm LCP pressure sensor is simulated to investigate the parameters that significantly influence the sensor characteristics under the uniform pressure range of 0 to 50 mmHg. The simulation results of the new design are compared to the experimental results from a previous design. The result shows that reducing the thickness of the sensing membrane can increase the sensitivity up to six times of that previously reported. An improvement of fabrication methodology is proposed to complete the LCP packaging.

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Design and Displacement Analysis of Three different Cantilever based MEMS Piezoresistive Pressure Sensor with Polymer (PDMS/PMMA) Thin Flim

Revista Gestão Inovação e Tecnologias ◽

10.47059/revistageintec.v11i2.1786 ◽

2021 ◽

Vol 11 (2) ◽

pp. 1629-1640

Author(s):

Kavitha K

Keyword(s):

Pressure Sensor ◽

High Sensitivity ◽

Comsol Multiphysics ◽

Sensor Applications ◽

Dimethyl Siloxane ◽

Piezoresistive Pressure Sensor ◽

Cantilever Structure ◽

As Stress ◽

P Type ◽

High Range

This paper mainly focuses on to get high displacement from polymer based piezoresistive cantilever for MEMS/NEMS pressure sensor applications. The displacement has been analyzed and compared with three different cantilever using PDMS (Poly dimethyl siloxane) and PMMA (Poly methyl methacrylate) materials. The p-type silicon piezoresistors connected the form based on wheat stone bridge to get high sensible pressure sensor with respect to low response. An according to get high displacement, obviously the other performance of parameters such as stress, strain gets high range. So, this analyzed cantilever structure used to design a pressure sensor with high sensitivity. The design and simulation are done by using COMSOL Multiphysics.

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Piezoelectric microresonant pressure sensor using aluminum nitride

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.16.2.025001 ◽

2017 ◽

Vol 16 (2) ◽

pp. 025001 ◽

Cited By ~ 2

Author(s):

Sujan Yenuganti ◽

Uma Gandhi ◽

Umapathy Mangalanathan

Keyword(s):

Aluminum Nitride ◽

Pressure Sensor

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Simulation based Analysis of Capacitive Pressure Sensor with COMSOL Multiphysics

International Journal of Engineering Research and ◽

10.17577/ijertv4is041064 ◽

2015 ◽

Vol V4 (04) ◽

Author(s):

Nisheka Anadkat ◽

Dr. M J S Rangachar ◽

Keyword(s):

Pressure Sensor ◽

Comsol Multiphysics ◽

Capacitive Pressure Sensor ◽

Simulation Based

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Novel MOSFET Based Pressure Sensor That Uses Combined Channel Piezoresistance and Gate Capacitance Effects

Recent Trends in Sensor Research and Technology ◽

10.37591/rtsrt.v2i2.5779 ◽

2015 ◽

Author(s):

Ajay AP ◽

KN Bhat ◽

Navakanta Bhat ◽

SM Kulkarni

Keyword(s):

Pressure Sensor ◽

Capacitive Sensor ◽

Comsol Multiphysics ◽

Linear Region ◽

Modeling And Analysis ◽

Capacitance Variation ◽

Promising Application ◽

Single Effect ◽

Capacitance Effects ◽

Combined Channel

The paper considers modeling and analysis of a square and circular diaphragm Suspended Gate MOSFET based pressure sensor using COMSOL Multiphysics. Two structures, one a square with an n-channel MOSFET at the center and the second a circle with a p-channel MOSFET at the edge of the diaphragm were simulated. The piezoresistance effect of the channel and capacitance variation due to the suspended gate have been exploited in designing the sensor. The combined effect of the two has not been reported in literature so far and this is the first attempt at combining the two effects for transduction. Channel is modelled separately as an equivalent piezoresistor and the capacitance variation is also simulated in COMSOL. The MOSFET characteristics in the unstrained and strained conditions are modelled using COMSOL and MATLAB. The MOSFETs are operated in their linear region. This novel MOSFET design has a promising application and has a better sensitivity compared to MOSFET exploiting a single effect or a similar piezoresistive or capacitive sensor.

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Measurement of output voltage of aluminum nitride thin film as a pressure sensor at high temperature

Journal of the European Ceramic Society ◽

10.1016/j.jeurceramsoc.2005.08.011 ◽

2006 ◽

Vol 26 (15) ◽

pp. 3425-3430 ◽

Cited By ~ 9

Author(s):

Kazushi Kishi ◽

Yasunobu Ooishi ◽

Hiroaki Noma ◽

Eizo Ushijima ◽

Naohiro Ueno ◽

...

Keyword(s):

Thin Film ◽

High Temperature ◽

Aluminum Nitride ◽

Pressure Sensor ◽

Output Voltage

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Design and Simulation of Piezoresistive Pressure Sensor for Ocean Depth Measurements

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.411-414.1552 ◽

2013 ◽

Vol 411-414 ◽

pp. 1552-1558

Author(s):

Guan Rong Tang ◽

Si Di ◽

Xin Xu ◽

Qiu Lan Chen

Keyword(s):

Optimum Design ◽

Deep Water ◽

Pressure Sensor ◽

Measurement Range ◽

Comsol Multiphysics ◽

Good Linearity ◽

Piezoresistive Pressure Sensor ◽

Simulation Results ◽

Output Characteristics

This paper presents the design and simulation of a piezoresistive pressure sensor with wide operation range (up to the pressure of 1000 m-deep water). Structural and electrical simulations were carried out using COMSOL Multiphysics 4.3. The dimension of the membrane, and the geometry and placement of piezoresistors, were optimized through structural simulations. Electrical simulations were used to evaluate the performance of selected sensors. The output characteristics revealed good linearity throughout the measurement range with sensitivities of 0.4500~0.8964 mV/V/MPa. The optimum design of sensor was determined according to the simulation results.

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