High Spatial Resolution Elemental Mapping of Multilayers Using a Field Emission Transmission Electron Microscope Equipped with an Imaging Filter

AbstractWe report the installation and performance evaluation of a probe aberration-corrected high-resolution JEOL JEM-ARM200F transmission electron microscope (TEM). We provide details on construction of the room that enables us to obtain scanning transmission electron microscope (STEM) data without any evident distortions/noise from the external environment. The microscope routinely delivers expected performance. We show that the highest STEM spatial resolution and energy resolution achieved with this microscope are 0.078 nm and 0.34 eV, respectively. We report a direct comparative evaluation of the performance of this microscope with a Schottky thermal field-emission gun versus a cold field-emission gun. Cold field-emission illumination improves spatial resolution of the high current probe for analytical spectroscopy, the TEM information limit, and the electron energy resolution compared to the Schottky thermal field-emission source.

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Elemental and Chemical Analysis with High-Spatial Resolution using Electron Energy-Loss Spectroscopy in Transmission Electron Microscope

Nihon Kessho Gakkaishi ◽

10.5940/jcrsj.44.355 ◽

2002 ◽

Vol 44 (6) ◽

pp. 355-364

Author(s):

Koji KIMOTO

Keyword(s):

Electron Microscope ◽

Chemical Analysis ◽

Energy Loss ◽

Electron Energy ◽

Spatial Resolution ◽

Transmission Electron Microscope ◽

Electron Energy Loss Spectroscopy ◽

High Spatial Resolution ◽

Transmission Electron ◽

Electron Energy Loss

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A New 200kv Energy Filter Field Emission Transmission Electron Microscope

Microscopy and Microanalysis ◽

10.1017/s1431927600022108 ◽

1998 ◽

Vol 4 (S2) ◽

pp. 396-397

Author(s):

T. Kaneyama ◽

K. Tsuno ◽

T. Honda ◽

M. Kersker ◽

K. Tsuda ◽

...

Keyword(s):

Electron Microscope ◽

High Resolution ◽

Field Emission ◽

Transmission Electron Microscope ◽

High Resolution Imaging ◽

Elemental Mapping ◽

Lens System ◽

Transmission Electron ◽

Wide Range ◽

Resolution Imaging

In the field of biological and materials sciences, the importance of energy filter transmission electron microscope(EF-TEM) is increasing. Because it is a powerful instrument for contrast enhancement and obtaining elemental mapping images. We have developed a 200kV EF-TEM equipped with a fieldemission gun and in-column spectrometer. The new EF-TEM JEM-2010FEF inherits the performance in high resolution imaging and analysis from field emission TEM. The outer view is shown in Fig.l.Figure 2 shows the lens configuration of JEM-2010FEF. An in-column Q-type spectrometer is introduced within the imaging lens system. It was designed to have image distortion less than 1% and dispersion power 1.2p.m/eV for 200keV electrons. There is no need of compensating procedure of distortion. Imaging lens system consists of two objective lenses, three intermediate lenses and three projector lenses. The 8-stage imaging lens system enables wide range of imaging modes equal to conventional TEMs; energy spectroscopic image of magnification from ×200 to × 1,500,000, energy spectroscopic diffraction of camera length from 200mm to 2,000mm.

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Development of Line Analysis and Real-Time Elemental Mapping System in Stem Equipped with a Two-Window Energy Filter

Microscopy and Microanalysis ◽

10.1017/s1431927600031743 ◽

2001 ◽

Vol 7 (S2) ◽

pp. 1134-1135

Author(s):

K. Kaji ◽

T. Aoyama ◽

S. Taya ◽

S. Isakozawa

Keyword(s):

Electron Microscope ◽

Energy Loss ◽

Transmission Electron Microscope ◽

Scanning Transmission Electron Microscope ◽

Elemental Mapping ◽

Additional Function ◽

Edge Structure ◽

Transmission Electron ◽

Mapping System ◽

Scanning Transmission

The ability to obtain elemental maps processed by using inelastically scattered electrons in a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) is extremely useful in the analysis of materials, and semiconductor devices such as ULSI’s and GMR heads. Electron energy loss spectra (EELS) also give useful information not only to identify unknown materials but also to study chemical bonding states of the objective atoms. Hitachi developed an elemental mapping system, consisting of a STEM (Hitachi, HD- 2000) equipped with a two-window energy filter (Hitachi, ELV-2000), and performed realtime conventional jump-ratio images with nanometer resolution by in-situ calculation of energy-filtered signals [1]. Additional function of acquiring EELS along any lines on specimen has been developed in this system to investigate the energy loss near edge structure (ELNES).Figure 1 shows a schematic figure of the two-window energy filter, consisting of two quadrupole lenses for focusing and zooming spectra, respectively, a magnetic prism spectrometer, a deflection coil and two kinds of electron beam detectors.

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Formation mechanism of Sn-patch between SnAgCu solder and Ti/Ni(V)/Cu under bump metallization

Journal of Materials Research ◽

10.1557/jmr.2009.0315 ◽

2009 ◽

Vol 24 (8) ◽

pp. 2638-2643 ◽

Cited By ~ 5

Author(s):

Kai-Jheng Wang ◽

Yan-Zuo Tsai ◽

Jenq-Gong Duh ◽

Toung-Yi Shih

Keyword(s):

Electron Microscope ◽

Field Emission ◽

Formation Mechanism ◽

Transmission Electron Microscope ◽

Electron Probe ◽

Under Bump Metallization ◽

Rich Phase ◽

Snagcu Solder ◽

Electron Probe Microanalyzer ◽

Transmission Electron

An Sn-patch formed in Ni(V)-based under bump metallization during reflow and aging. To elucidate the evolution of the Sn-patch, the detailed compositions and microstructure in Sn–Ag–Cu and Ti/Ni(V)/Cu joints were analyzed by a field emission electron probe microanalyzer (EPMA) and transmission electron microscope (TEM), respectively. There existed a concentration redistribution in the Sn-patch, and its microstructure also varied with aging. The Sn-patch consisted of crystalline Ni and an amorphous Sn-rich phase after reflow, whereas V2Sn3 formed with amorphous an Sn-rich phase during aging. A possible formation mechanism of the Sn-patch was proposed.

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