Radiation dose optimized lateral expansion of the field of view in synchrotron radiation X-ray tomographic microscopy

Abstract To get both the resolution and the field of view needed, 3Di devices are characterized in this paper using phase-contrast X-ray tomography performed in a synchrotron source. The paper shows how the synchrotron-based tomography can be routinely used as a tool for failure analysis, and how some strategies can be applied to make those analyses more time-efficient and automatic without any loss of resolution. It presents and assesses the possibilities offered by a synchrotron radiation facility such as European Synchrotron Radiation Facility for the field of failure analysis in microelectronics. The paper illustrates those possibilities through two main examples, based on two different types of connection of bottom and top tiers in 3D integration, either thermocompression with copper pillars or hybrid bonding using copper pads. Several strategies have been successfully tested for the data acquisition to be faster and to limit the needed human intervention as much as possible.

Download Full-text

Enlarge the Field of View of Nano CT in Synchrotron Radiation

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.380-384.1808 ◽

2013 ◽

Vol 380-384 ◽

pp. 1808-1811

Author(s):

Ren Bo Tan ◽

Jian Fu ◽

Li Yuan Chen

Keyword(s):

Synchrotron Radiation ◽

High Spatial Resolution ◽

Processing Method ◽

Field Of View ◽

Filter Back Projection ◽

Back Projection ◽

Parallel Beam ◽

X Ray ◽

Radiation Imaging ◽

Data Processing Method

nanoCT with synchrotron radiation has a high spatial resolution up to nanoscale which provides an approach to the 3D inter-structure of sample of tiny size in the research of biology, materials and so on. However, due to the high resolution it provide, the field of view is limited to only about 15~60μm. In order to improve the scale of field of view, we discussed a new scan mode called half-scan which is using the symmetry of parallel-beam x-ray and newly applied in the synchrotron radiation imaging field. In this paper, we deduced the data processing method which is consisted of data preprocessing and filter back projection (FBP) algorithm. Numerical simulation and analysis demonstrate that the field of view can be enlarged up to 100% with this method.

Download Full-text

Reduction Method of Patients' Radiation Dose Considering the Size of Field of View with a Digital Cine X-ray System Loading a Flat-panel Detector

Japanese Journal of Radiological Technology ◽

10.6009/jjrt.67.1443 ◽

2011 ◽

Vol 67 (11) ◽

pp. 1443-1447 ◽

Cited By ~ 1

Author(s):

Mamoru Kato ◽

Koichi Chida ◽

Kyouhei Yoshida ◽

Fumiaki Sasaki ◽

Masafumi Sasaki ◽

...

Keyword(s):

Radiation Dose ◽

Reduction Method ◽

Field Of View ◽

Flat Panel ◽

X Ray ◽

Flat Panel Detector

Download Full-text

Monte Carlo simulation of radiation dose distribution in X-ray imaging at Shanghai Synchrotron Radiation Facility

2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) ◽

10.1109/embc.2017.8036884 ◽

2017 ◽

Author(s):

Huiping Bai ◽

Yi Chen ◽

Han Guo ◽

Jun Zhao ◽

Jianqi Sun

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Synchrotron Radiation ◽

Radiation Dose ◽

Dose Distribution ◽

Shanghai Synchrotron Radiation Facility ◽

X Ray ◽

X Ray Imaging

Download Full-text

Direct Observation of Monolayer Zones in Al-wt 4% Cu

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100178823 ◽

1990 ◽

Vol 48 (1) ◽

pp. 14-15

Author(s):

B. Jouffrey ◽

D. Dorignac ◽

A. Bourret

Keyword(s):

Solid Solution ◽

Synchrotron Radiation ◽

Direct Observation ◽

Supersaturated Solid Solution ◽

Original Model ◽

X Ray ◽

Image Position

Since the early works on GP zones and the model independently proposed by Preston and Guinier on the first steps of precipitation in supersaturated solid solution of aluminium containing a few percent of copper, many works have been performed to understand the structure of different stages in the sequence of precipitation.The scheme which is generally admitted can be drawn from a work by Phillips.In their original model Guinier and Preston analysed a GP zone as composed of a single (100) copperrich plane surrounded by aluminum atomic planes with a slightly shorter distance from the original plane than in the solid solution.From X-ray measurements it has also been shown that GP1 zones were not only copper monolayer zones. They could be up to a few atomic planes thick. Different models were proposed by Guinier, Gerold, Toman. Using synchrotron radiation, proposals have been recently made.

Download Full-text