High-Resolution X-Ray Computed Tomography—What Synchrotron Sources Can Bring to 3Di Devices Failure Analysis

2016 ◽  
Author(s):  
A. Fraczkiewicz ◽  
A. Jouve ◽  
T. Mourier ◽  
P. Bleuet ◽  
E. Capria ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Failure Analysis ◽  
Phase Contrast ◽  
European Synchrotron Radiation Facility ◽  
Field Of View ◽  
3D Integration ◽  
Synchrotron Source ◽  
X Ray ◽  
Different Types ◽  
X Ray Computed

Abstract To get both the resolution and the field of view needed, 3Di devices are characterized in this paper using phase-contrast X-ray tomography performed in a synchrotron source. The paper shows how the synchrotron-based tomography can be routinely used as a tool for failure analysis, and how some strategies can be applied to make those analyses more time-efficient and automatic without any loss of resolution. It presents and assesses the possibilities offered by a synchrotron radiation facility such as European Synchrotron Radiation Facility for the field of failure analysis in microelectronics. The paper illustrates those possibilities through two main examples, based on two different types of connection of bottom and top tiers in 3D integration, either thermocompression with copper pillars or hybrid bonding using copper pads. Several strategies have been successfully tested for the data acquisition to be faster and to limit the needed human intervention as much as possible.

Fusion imaging of fluorescent and phase-contrast x-ray computed tomography using synchrotron radiation in medical biology

2006 ◽  
Author(s):  
Jin Wu ◽  
Tohoru Takeda ◽  
Thet Thet Lwin ◽  
Naoki Sunaguchi ◽  
Tadanori Fukami ◽  
...  
Keyword(s):  
Computed Tomography ◽  
Synchrotron Radiation ◽  
Phase Contrast ◽  
Fusion Imaging ◽  
X Ray ◽  
X Ray Computed

Medical Applications with Synchrotron Radiation in Japan

1998 ◽  
Vol 5 (3) ◽  
pp. 326-332 ◽  
Author(s):  
Tohoru Takeda ◽  
Yuji Itai ◽  
Kazuyuki Hyodo ◽  
Masami Ando ◽  
Takao Akatsuka ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Coronary Arteries ◽  
Phase Contrast ◽  
Coronary Arteriography ◽  
Medical Applications ◽  
Imaging Method ◽  
Two Dimensional ◽  
X Ray ◽  
X Ray Imaging ◽  
X Ray Computed

In Japan, various medical applications of synchrotron X-ray imaging, such as angiography, monochromatic X-ray computed tomography (CT), radiography and radiation therapy, are being developed. In particular, coronary arteriography (CAG) is quite an important clinical application of synchrotron radiation. Using a two-dimensional imaging method, the first human intravenous CAG was carried out at KEK in May 1996; however, further improvements of image quality are required in clinical practice. On the other hand, two-dimensional aortographic CAG revealed canine coronary arteries as clearly as those on selective CAG, and coronary arteries less than 0.2 mm in diameter. Among applications of synchrotron radiation to X-ray CT, phase-contrast X-ray CT and fluorescent X-ray CT are expected to be very interesting future applications of synchrotron radiation. For actual clinical applications of synchrotron radiation, a medical beamline and a laboratory are now being constructed at SPring-8 in Harima.

scholarly journals Advanced Non-Destructive in Situ Characterization of Metals with the French Collaborating Research Group D2AM/BM02 Beamline at the European Synchrotron Radiation Facility

Metals ◽  
2019 ◽  
Vol 9 (3) ◽  
pp. 352 ◽  
Author(s):  
Gilbert André Chahine ◽  
Nils Blanc ◽  
Stephan Arnaud ◽  
Frédéric De Geuser ◽  
René Guinebretière ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Research Group ◽  
Materials Science ◽  
Industrial Applications ◽  
European Synchrotron Radiation Facility ◽  
Polycrystalline Materials ◽  
Formation Mechanisms ◽  
Synchrotron Source ◽  
X Ray

The ability to non-destructively measure the structural properties of devices, either in situ or operando, are now possible using an intense X-ray synchrotron source combined with specialized equipment. This tool attracted researchers, in particular metallurgists, to attempt more complex and ambitious experiments aimed at answering unresolved questions in formation mechanisms, phase transitions, and magnetism complex alloys for industrial applications. In this paper, we introduce the diffraction diffusion anomale multi-longueur d’onde (D2AM) beamline, a French collaborating research group (CRG) beamline at the European Synchrotron Radiation Facility (ESRF), partially dedicated to in situ X-ray scattering experiments. The design of the beamline combined with the available equipment (two-dimensional fast photon counting detectors, sophisticated high precision kappa diffractometer, a variety of sample environments, continuous scanning for X-ray imaging, and specific software for data analysis) has made the D2AM beamline a highly efficient tool for advanced, in situ synchrotron characterization in materials science, e.g., single crystal or polycrystalline materials, powders, liquids, thin films, or epitaxial nanostructures. This paper gathers the main elements and equipment available at the beamline and shows its potential and flexibility in performing a wide variety of temporally, spatially, and energetically resolved X-ray synchrotron scattering measurements in situ.

Numerical analysis of shift error in X-ray phase contrast imaging for large field of view

2017 ◽  
Vol 34 (1) ◽  
pp. 8
Author(s):  
Jianheng Huang ◽  
Yaohu Lei ◽  
Xin Liu ◽  
Jinchuan Guo ◽  
Ji Li ◽  
...  
Keyword(s):  
Numerical Analysis ◽  
Phase Contrast ◽  
Field Of View ◽  
Phase Contrast Imaging ◽  
Large Field ◽  
Contrast Imaging ◽  
X Ray

scholarly journals Visualization Ability of Phase-Contrast Synchrotron-Based X-Ray Imaging Using an X-Ray Interferometer in Soft Tissue Tumors

2021 ◽  
Vol 20 ◽  
pp. 153303382110101
Author(s):  
Thet-Thet Lwin ◽  
Akio Yoneyama ◽  
Hiroko Maruyama ◽  
Tohoru Takeda
Keyword(s):  
Computed Tomography ◽  
Soft Tissue ◽  
Spatial Resolution ◽  
Phase Contrast ◽  
Soft Tissue Tumors ◽  
X Ray ◽  
3 Dimensional ◽  
Computed Tomography Images ◽  
X Ray Imaging ◽  
X Ray Computed

Phase-contrast synchrotron-based X-ray imaging using an X-ray interferometer provides high sensitivity and high spatial resolution, and it has the ability to depict the fine morphological structures of biological soft tissues, including tumors. In this study, we quantitatively compared phase-contrast synchrotron-based X-ray computed tomography images and images of histopathological hematoxylin-eosin-stained sections of spontaneously occurring rat testicular tumors that contained different types of cells. The absolute densities measured on the phase-contrast synchrotron-based X-ray computed tomography images correlated well with the densities of the nuclear chromatin in the histological images, thereby demonstrating the ability of phase-contrast synchrotron-based X-ray imaging using an X-ray interferometer to reliably identify the characteristics of cancer cells within solid soft tissue tumors. In addition, 3-dimensional synchrotron-based phase-contrast X-ray computed tomography enables screening for different structures within tumors, such as solid, cystic, and fibrous tissues, and blood clots, from any direction and with a spatial resolution down to 26 μm. Thus, phase-contrast synchrotron-based X-ray imaging using an X-ray interferometer shows potential for being useful in preclinical cancer research by providing the ability to depict the characteristics of tumor cells and by offering 3-dimensional information capabilities.

A new species of anapid spider (Araneae: Araneoidea, Anapidae) in Eocene Baltic amber, imaged using phase contrast X-ray computed micro-tomography

Zootaxa ◽  
2011 ◽  
Vol 2742 (1) ◽  
pp. 60 ◽  
Author(s):  
DAVID PENNEY ◽  
ANDREW MCNEIL ◽  
DAVID I. GREEN ◽  
ROBERT BRADLEY ◽  
YURI M. MARUSIK ◽  
...  
Keyword(s):  
New Species ◽  
Phase Contrast ◽  
Baltic Amber ◽  
X Ray ◽  
The Family ◽  
X Ray Computed ◽  
Micro Tomography ◽  
The Baltic ◽  
A New Species ◽  
Eocene Amber

A new species of the extant spider family Anapidae is described from a fossil mature male in Eocene amber from the Baltic region and tentatively assigned to the genus Balticoroma Wunderlich, 2004. Phase contrast X-ray computed micro-tomography was used to reveal important features that were impossible to view using traditional microscopy. Balticoroma wheateri new species is easily diagnosed from all other anapids by having clypeal extensions that run parallel to the ectal surface of the chelicerae and in having the metatarsus of the first leg highly reduced and modified into what is presumably a y-shaped clasping structure. Although only a single extant anapid species occurs in northern Europe, the family was diverse in the Eocene. The discovery of yet another anapid species in Baltic amber supports the idea that Eocene European forests may have been a hotspot of evolution for this family of spiders.

scholarly journals A large-solid-angle X-ray Raman scattering spectrometer at ID20 of the European Synchrotron Radiation Facility

2017 ◽  
Vol 24 (2) ◽  
pp. 521-530 ◽  
Author(s):  
S. Huotari ◽  
Ch. J. Sahle ◽  
Ch. Henriquet ◽  
A. Al-Zein ◽  
K. Martel ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Raman Scattering ◽  
Solid Angle ◽  
European Synchrotron Radiation Facility ◽  
Electronic Excitations ◽  
Raman Scattering Spectroscopy ◽  
X Ray ◽  
Area Detector ◽  
Spectroscopic Tool

An end-station for X-ray Raman scattering spectroscopy at beamline ID20 of the European Synchrotron Radiation Facility is described. This end-station is dedicated to the study of shallow core electronic excitations using non-resonant inelastic X-ray scattering. The spectrometer has 72 spherically bent analyzer crystals arranged in six modular groups of 12 analyzer crystals each for a combined maximum flexibility and large solid angle of detection. Each of the six analyzer modules houses one pixelated area detector allowing for X-ray Raman scattering based imaging and efficient separation of the desired signal from the sample and spurious scattering from the often used complicated sample environments. This new end-station provides an unprecedented instrument for X-ray Raman scattering, which is a spectroscopic tool of great interest for the study of low-energy X-ray absorption spectra in materials under in situ conditions, such as in operando batteries and fuel cells, in situ catalytic reactions, and extreme pressure and temperature conditions.

Update On Synchrotron Radiation TXRF: New Results

1998 ◽  
Vol 524 ◽  
Author(s):  
S. Brennan ◽  
P. Pianetta ◽  
S. Ghosh ◽  
N. Takaura ◽  
C. Wiemer ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Total Reflection ◽  
Synchrotron Source ◽  
X Ray ◽  
Non Destructive

ABSTRACTSynchrotron-based total-reflection x-ray fluorescence(SR-TXRF) has been developed as a leading technique for measuring wafer cleanliness. It holds advantages over other techniques in that it is non-destructive and allows mapping of the surface. The highest sensitivity observed thus far is 3x108 atoms/cm 2 (- 3fg) for 1000 second count time. Several applications of SR-TXRF are presented which take advantage of the energy tunability of the synchrotron source or the mapping capability.

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