scholarly journals Interface-sensitive imaging by an image reconstruction aided X-ray reflectivity technique

2017 ◽  
Vol 50 (3) ◽  
pp. 712-721 ◽  
Author(s):  
Jinxing Jiang ◽  
Keiichi Hirano ◽  
Kenji Sakurai
Keyword(s):  
Ultrathin Films ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
Two Dimensional ◽  
Plane Angle ◽  
Pixel Size ◽  
Parallel Beam ◽  
X Ray ◽  
Area Detector ◽  
Grazing Incidence Angle

Recently, the authors have succeeded in realizing X-ray reflectivity imaging of heterogeneous ultrathin films at specific wavevector transfers by applying a wide parallel beam and an area detector. By combining in-plane angle and grazing-incidence angle scans, it is possible to reconstruct a series of interface-sensitive X-ray reflectivity images at different grazing-incidence angles (proportional to wavevector transfers). The physical meaning of a reconstructed X-ray reflectivity image at a specific wavevector transfer is the two-dimensional reflectivity distribution of the sample. In this manner, it is possible to retrieve the micro-X-ray reflectivity (where the pixel size is on the microscale) profiles at different local positions on the sample.

Generalized grazing-incidence-angle X-ray diffraction (G-GIXD) using image plates

1998 ◽  
Vol 5 (3) ◽  
pp. 488-490 ◽  
Author(s):  
Yasuo Takagi ◽  
Masao Kimura
Keyword(s):  
Incidence Angle ◽  
Incident Beam ◽  
Grazing Incidence ◽  
X Rays ◽  
X Ray Diffraction ◽  
X Ray ◽  
Surface And Interface ◽  
Out Of Plane ◽  
Grazing Incidence Angle ◽  
Interface Layers

A new and more `generalized' grazing-incidence-angle X-ray diffraction (G-GIXD) method which enables simultaneous measurements both of in- and out-of-plane diffraction images from surface and interface structures has been developed. While the method uses grazing-incidence-angle X-rays like synchrotron radiation as an incident beam in the same manner as in `traditional' GIXD, two-dimensional (area) detectors like image plates and a spherical-type goniometer are used as the data-collection system. In this way, diffraction images both in the Seemann–Bohlin (out-of-plane) and GIXD geometry (in-plane) can be measured simultaneously without scanning the detectors. The method can be applied not only to the analysis of the in-plane crystal structure of epitaxically grown thin films, but also to more general research topics like the structural analysis of polycrystalline mixed phases of thin surface and interface layers.

Grazing incidence synchrotron x-ray diffraction method for analyzing thin films

1987 ◽  
Vol 2 (4) ◽  
pp. 471-477 ◽  
Author(s):  
G. Lim ◽  
W. Parrish ◽  
C. Ortiz ◽  
M. Bellotto ◽  
M. Hart
Keyword(s):  
Thin Films ◽  
Penetration Depth ◽  
Incidence Angle ◽  
Depth Profiling ◽  
Diffraction Method ◽  
Grazing Incidence ◽  
Parallel Beam ◽  
X Ray ◽  
Small Incidence ◽  
Iron Oxide Films

A method using synchrotron radiation parallel beam x-ray optics with a small incidence angle α on the specimen and 2Θ-detector scanning is described for depth profiling analysis of thin films. The instrumentation is the same as used for Θ:2Θ synchrotron parallel beam powder diffractometry, except that the specimen is uncoupled from the detector. There is no profile distortion. Below the critical angle for total reflection αc, the top tens of Angstroms are sampled. Depth profiling is controlled to a few Angstroms using a small α and 0.005° steps. The penetration depth increases to several hundred Angstroms as α approaches αc. Above αc there is a rapid increase in penetration depth to a thousand Angstroms or more and the profiling cannot be sensitively controlled. At grazing incidence the peaks are shifted several tenths of a degree by the x-ray refraction and an experimental procedure for calculating the shifts is described. The method is illustrated with an analysis of iron oxide films.

A Precision Grazing-incidence Angle Error Measurement of a Hard X-ray Condenser Mirror Using Single-grating Interferometry

2013 ◽  
Vol 26 (5) ◽  
pp. 13-16 ◽  
Author(s):  
Ryosuke Fukui ◽  
Jangwoo Kim ◽  
Satoshi Matsuyama ◽  
Hirokatsu Yumoto ◽  
Yuichi Inubushi ◽  
...  
Keyword(s):  
Incidence Angle ◽  
Grazing Incidence ◽  
Error Measurement ◽  
Angle Error ◽  
X Ray ◽  
Grazing Incidence Angle

The Effects of Using Long Soller Slits as “Parallel Beam Optics” for Gixrd on Diffraction Data

1993 ◽  
Vol 37 ◽  
pp. 167-173
Author(s):  
Michael O. Eatough ◽  
Raymond P. Gochner
Keyword(s):  
Diffraction Data ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
Substrate Material ◽  
Beam Optics ◽  
Parallel Beam ◽  
Beam Geometry ◽  
Thin Film Optics ◽  
Parallel Beam Geometry ◽  
Grazing Incidence Angle

AbstractGrazing incidence x-ray diffraction (GIXRD) using long soller slit assemblies and a flat crystal monochromator, sometimes referred to as thin film optics, are used to study poly crystal line thin films, polymers, metals, etc. The unique ability of GIXRD to characterize crystalline materials as function of depth and provide accurate strain measurements has lead to the growing popularity of this technique. This non-focusing pseudo-parallel beam geometry can produce various effects on diffraction data which can make interpretation difficult Artifacts such as peak splitting, kα2 distortion, and peaks which shift dramatically as a function of grazing incidence angle are observed when using GIXRD. These artifacts can be related to grazing incidence angle, the divergence of the soller plates, the thickness of the soller plates, the substrate material, and the type of monochromator used. This paper briefly describes some of the topics discussed at the 1992 & 1993 Denver Conferences workshops on parallel beam optics.

Imaging X-ray fluorescence microscope with a Wolter-type grazing-incidence mirror

1998 ◽  
Vol 5 (3) ◽  
pp. 1117-1118 ◽  
Author(s):  
S. Aoki ◽  
A. Takeuchi ◽  
M. Ando
Keyword(s):  
Spatial Resolution ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
Fluorescence Microscope ◽  
X Rays ◽  
X Ray ◽  
Photon Factory ◽  
Grazing Incidence Angle ◽  
Fluorescence Images ◽  
Better Than

A Wolter-type grazing-incidence mirror was used as an objective for an imaging X-ray fluorescence microscope. The microscope was constructed at the beamline 6C2 of the Photon Factory. The shortest wavelength used was ∼0. 1 nm, which was limited by the grazing-incidence angle of the mirror. To demonstrate the possibility of recording X-ray fluorescence images, several fine grids were used as test specimens. Characteristic X-rays emitted from each specimen could be clearly imaged. Spatial resolution was estimated to be better than 10 µm.

Generalized Grazing Incidence-Angle X-Ray Diffraction Studies on InAs Quantum Dots on Si (100) Substrates

2000 ◽  
Vol 39 (Part 1, No. 7B) ◽  
pp. 4483-4485 ◽  
Author(s):  
Takeshi Uragami ◽  
Hiroshi Fujioka ◽  
Ichitaro Waki ◽  
Takaaki Mano ◽  
Kanta Ono ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
Inas Quantum Dots ◽  
X Ray ◽  
Grazing Incidence Angle

Characterization of Interfacial Roughness in Semiconductor Heterostructures by X-Ray Reflectivity

1987 ◽  
Vol 103 ◽  
Author(s):  
A. Krol ◽  
C. J. Sher ◽  
H. Resat ◽  
S. C. Woronick ◽  
W. Ng ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
Semiconductor Heterostructures ◽  
X Rays ◽  
Interfacial Roughness ◽  
X Ray ◽  
Grazing Incidence Angle

ABSTRACTThe reflection of monochromatic x-rays by a layered heterostructure can be utilized as a nondestructive probe to obtain information on the interfacial roughness in the material. Interference between x-rays reflected from the top surface and the interfaces can give rise to pronounced oscillations in the reflectivity as a function of the grazing incidence angle. We have made use of this technique to investigate the interfacial roughness in semiconductor heterostructures grown by molecular beam epitaxy.

Application of Graded Multilayer Optics in X-Ray Diffraction

1995 ◽  
Vol 39 ◽  
pp. 57-71 ◽  
Author(s):  
M. Schuster ◽  
H. Göbel
Keyword(s):  
Incidence Angle ◽  
Bragg Reflection ◽  
Incident Beam ◽  
Grazing Incidence ◽  
Small Dimension ◽  
X Ray Diffraction ◽  
Parallel Beam ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Focused Beam

Periodic multilayers are ideally suited as high-reflectivity and wide-bandwidth Bragg reflectors. Their period can be matched laterally to the incidence angle so that for all points on the reflector, Bragg reflection is obtained for the same wavelength. Three major types of laterally graded multilayer optics were appJied to X-ray diffraction: (i) Parabolically curved multilayer mirrors were used to convert divergent radiation emerging from an X-ray source into a parallel beam. The parallel beam was applied in powder diffraction, grazing incidence diffraction, reflectometry, high-resolution diffraction, and protein crystallography, (ii) Elliptically curved multilayer mirrors focused the divergent radiation from the source into a line on the sample or detector. The high brilliance and small dimension of the focused beam make this mirror type suited for transmission diffractometry of capillary and fiber specimens, (iii) Planar multilayer mirrors were employed in divergent-beam optics. In Bragg-Brentano diffractometers, this mirror type can serve as a compact incident-beam monochromator for removing Kβ lines and Bremsstrahlung.

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