High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film

1989 ◽  
Vol 36 (12) ◽  
pp. 2868-2872 ◽  
Author(s):  
K. Sera ◽  
F. Okumura ◽  
H. Uchida ◽  
S. Itoh ◽  
S. Kaneko ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
High Performance ◽  
Laser Annealing ◽  
Silicon Film ◽  
Hydrogenated Amorphous Silicon ◽  
Excimer Laser Annealing ◽  
Amorphous Silicon Film ◽  
Hydrogenated Amorphous ◽  
Xecl Excimer Laser

Effects of Excimer Laser Annealing Process on the Ni-Sputtered Amorphous Silicon Film

2010 ◽  
Vol 13 (10) ◽  
pp. H346 ◽  
Author(s):  
Moojin Kim ◽  
GuangHai Jin ◽  
Hoonkee Min ◽  
HoKyoon Chung ◽  
Sangsoo Kim ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Silicon Film ◽  
Annealing Process ◽  
Excimer Laser Annealing ◽  
Amorphous Silicon Film

Effect of Laser-Plasma X-Ray Irradiation on Crystallization of Amorphous Silicon Film by Excimer Laser Annealing

2007 ◽  
Vol 46 (No. 44) ◽  
pp. L1061-L1063 ◽  
Author(s):  
Naoto Matsuo ◽  
Kazuya Uejukkoku ◽  
Akira Heya ◽  
Sho Amano ◽  
Yasuyuki Takanashi ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Plasma ◽  
Laser Annealing ◽  
Silicon Film ◽  
Excimer Laser Annealing ◽  
X Ray ◽  
Amorphous Silicon Film

Dynamics of the excimer laser annealing of hydrogenated amorphous silicon thin films

1999 ◽  
Vol 75 (4) ◽  
pp. 498-500 ◽  
Author(s):  
G. Ivlev ◽  
E. Gatskevich ◽  
V. Cháb ◽  
J. Stuchlı́k ◽  
V. Vorlı́ček ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Hydrogenated Amorphous Silicon ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films ◽  
Hydrogenated Amorphous
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