In-situ electrical characterization of co-evaporated Zr-V, Zr-Ti and Zr-Co thin getter films during thermal activation

Author(s):  
Sylvain Lemettre ◽  
Sana Hammami ◽  
Alain Bosseboeuf ◽  
Philippe Coste ◽  
Johan Moulin
2019 ◽  
Vol 25 (11) ◽  
pp. 4091-4096
Author(s):  
Sylvain Lemettre ◽  
Sana Hammami ◽  
Alain Bosseboeuf ◽  
Philippe Coste ◽  
Johan Moulin

2019 ◽  
Vol 1319 ◽  
pp. 012012
Author(s):  
C Bessouet ◽  
S Lemettre ◽  
A Bosseboeuf ◽  
P Coste ◽  
Ch Renard ◽  
...  

AIP Advances ◽  
2014 ◽  
Vol 4 (11) ◽  
pp. 117126 ◽  
Author(s):  
L. Arzubiaga ◽  
F. Golmar ◽  
R. Llopis ◽  
F. Casanova ◽  
L. E. Hueso

2009 ◽  
Vol 419-420 ◽  
pp. 21-24
Author(s):  
Ming Chang ◽  
Chia Hung Lin ◽  
Chung Po Lin ◽  
Juti Rani Deka

With rapid expansion of nanotechnology, microminiaturization has become imperative in the field of micro/nano fabrication. A nanomanipulation system with high degrees of freedom that can perform nanomachining, nanofabrication and mechanical/electrical characterization of nanoscale objects inside a scanning electron microscope (SEM) is presented. The manipulation system consists of several individual operating units each having three linear stages and one rotational stage. The body of the manipulator is designed using the idea of superposition. Each operating unit can move in the permissible range of SEM’s vacuum chamber and can increase or decrease the number of units according to the requirement. Experiments were executed to investigate the in-situ electrical resistance of nano materials.


2013 ◽  
Vol 19 (S2) ◽  
pp. 456-457
Author(s):  
M. Rudneva ◽  
T. Kozlova ◽  
H.W. Zandbergen

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.


2010 ◽  
Vol 16 (S2) ◽  
pp. 1800-1801 ◽  
Author(s):  
K Roelofs ◽  
S Xu ◽  
G Poirier ◽  
N Yao

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.


1993 ◽  
Vol 24 (4) ◽  
pp. 389-393
Author(s):  
B. Balland ◽  
R. Botton ◽  
M. Lemiti ◽  
J.C. Bureau ◽  
A. Glachant

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