Development of a Temporary Bonding Tape Having over 300 degC Thermal Resistance for Cu-Cu Direct Bonding

Author(s):  
Izumi Daido ◽  
Ryoichi Watanabe ◽  
Toshio Takahashi ◽  
Munehiro Hatai
2016 ◽  
Vol 2016 (1) ◽  
pp. 000094-000099
Author(s):  
Alex Brewer ◽  
Alex Laymon ◽  
John Moore

Abstract Many packaging processes require the protection of components while another application is conducted. This may include a planarizing coat over large topography while a deposition, bonding, or curing step is completed. Washable coatings are materials that protect the substrate during thermal or mechanical activities and are simply washed away using readily available and green products, such as water or detergent. Washable products are not new, an example includes laser washable coatings that remove debris from the heat activation zone (HAZ) during scribe and break processes. In such cases, thermal resistance is desired as high as possible. The chemistry of washable products includes polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) [1]. While these are excellent choices for consumer packaging (e.g. laundry packets, vitamins), they are best used in electronics for room temperature processing due to their cross-linking upon exposure to heat and metals. Alternatively, thermal resistant and washable products (e.g. DaeCoat™ 515) are available that provide protection to ≥300°C without the aid of mechanical tooling [2]. Planarizing coatings over metals can be thick (>300μm) as in cases where solder bump encapsulation is needed during dielectric coating and cure or when another die is thermal compression bonded. This approach has been demonstrated with washable temporary bonding adhesives in protecting C4 bumps while bonding micro-bumped die onto FPGA interposers [3]. Washable adhesives have been created for thermal and vacuum driven processing as EMI/RFI shielding in a PVD tool. Such coatings are applied to porous substrates, affixing die, processing, and removal by water washing [4]. Success in these and related temporary applications depend upon matching the chemistry of the washable coating with the process. Our experience in creating solutions for these and other industry needs will be discussed as well as the criteria for using temporary washable coatings.


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