The Dielectric Properties and Radiation Resistance of Aluminum Oxide Layers Obtained by Atomic Layer Deposition

2018 ◽  
Author(s):  
Dmitriy I. Dolzhenko ◽  
Viktoria M. Kapralova ◽  
Nikolay T. Sudar
Keyword(s):  
Dielectric Properties ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Radiation Resistance ◽  
Atomic Layer ◽  
Oxide Layers ◽  
Layer Deposition

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

2010 ◽  
Vol 22 (32) ◽  
pp. 3564-3567 ◽  
Author(s):  
Paul Poodt ◽  
Adriaan Lankhorst ◽  
Fred Roozeboom ◽  
Karel Spee ◽  
Diederik Maas ◽  
...  
Keyword(s):  
Solar Cell ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
High Speed ◽  
Atomic Layer ◽  
Oxide Layers ◽  
Layer Deposition

Improving the photodetection and stability of a visible-light QDs/ZnO phototransistor via an Al2O3 additional layer

2021 ◽  
Author(s):  
Sungho Park ◽  
Byung Jun Kim ◽  
Tae Yeon Kim ◽  
Eui Young Jung ◽  
Kyu-Myung Lee ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Quantum Dot ◽  
Aluminum Oxide ◽  
Thin Layer ◽  
Visible Light ◽  
Atomic Layer ◽  
Zno Films ◽  
Additional Layer ◽  
Layer Deposition

We have developed a visible-light phototransistor with excellent photodetection characteristics and stability via atomic layer deposition (ALD) to add a thin layer of aluminum oxide (Al2O3) to quantum dot (QD)/zinc oxide (ZnO) films.

Tuning the Composition and Nanostructure of Pt/Ir Films via Anodized Aluminum Oxide Templated Atomic Layer Deposition

2010 ◽  
Vol 20 (18) ◽  
pp. 3099-3105 ◽  
Author(s):  
David J. Comstock ◽  
Steven T. Christensen ◽  
Jeffrey W. Elam ◽  
Michael J. Pellin ◽  
Mark C. Hersam
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Anodized Aluminum ◽  
Anodized Aluminum Oxide ◽  
Layer Deposition

scholarly journals Dielectric properties of Er−doped HfO2 (Er∼15%) grown by atomic layer deposition for high-κ gate stacks

2010 ◽  
Vol 96 (18) ◽  
pp. 182901 ◽  
Author(s):  
C. Wiemer ◽  
L. Lamagna ◽  
S. Baldovino ◽  
M. Perego ◽  
S. Schamm-Chardon ◽  
...  
Keyword(s):  
Dielectric Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gate Stacks ◽  
Layer Deposition ◽  
Er Doped
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