The Deposition of Thin Metal Films in Low Temperature Plasma of Hollow Cathode Glow Discharge
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2016 ◽
Vol 693
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pp. 77-83
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2020 ◽
Vol 53
(6)
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pp. 407-412
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2016 ◽
Vol 20
(4)
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pp. 309-316
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1996 ◽
Vol 14
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pp. 704-708
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2015 ◽
Vol 737
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pp. 528-532