Threshold voltage variation extracted from MOSFET C-V curves by charge-based capacitance measurement

Author(s):  
Katsuhiro Tsuji ◽  
Kazuo Terada ◽  
Ryo Takeda ◽  
Takaaki Tsunomura ◽  
Akio Nishida ◽  
...  
2016 ◽  
Vol E99.C (4) ◽  
pp. 466-473
Author(s):  
Katsuhiro TSUJI ◽  
Kazuo TERADA ◽  
Ryo TAKEDA ◽  
Hisato FUJISAKA

2019 ◽  
Vol 14 (1) ◽  
pp. 1-6
Author(s):  
Alberto Vinícius Oliveira ◽  
Guilherme Vieira Gonçalves ◽  
Paula Ghedini Der Agopian ◽  
João Antonio Martino ◽  
Jérôme Mitard ◽  
...  

The implementation of a barrier potential layer underneath the channel region, well known as Ground Plane (GP) implantation, and its influence on the performance of relaxed germanium pFinFET devices is investigated in this manuscript. This study aims to explain the fin width dependence of the threshold voltage from experimental data and evaluates the ground plane doping concentration and its depth influence on relaxed p-type channel germanium FinFET parameters, as threshold voltage, transconductance and subthreshold swing, through Technology Computer-Aided Design (TCAD) numerical simulations. The threshold voltage variation reaches up to 80 mV from the narrowest device to the widest one, considering the studied range of ground plane doping concentration. Concerning the subthreshold swing parameter, neither the GP doping concentration, nor its depth play a significant role since the electrostatic coupling is predominant.


2020 ◽  
Vol 41 (3) ◽  
pp. 373-376
Author(s):  
Sanghyun Ban ◽  
Hyejung Choi ◽  
Wootae Lee ◽  
Seokman Hong ◽  
Hwanjun Zang ◽  
...  

2001 ◽  
Vol 48 (9) ◽  
pp. 1995-2001 ◽  
Author(s):  
K. Takeuchi ◽  
R. Koh ◽  
T. Mogami

2006 ◽  
Vol 27 (7) ◽  
pp. 602-604 ◽  
Author(s):  
C. Anghel ◽  
B. Bakeroot ◽  
Y.S. Chauhan ◽  
R. Gillon ◽  
C. Maier ◽  
...  

2008 ◽  
Vol 21 (1) ◽  
pp. 33-40 ◽  
Author(s):  
Rouwaida Kanj ◽  
Rajiv V. Joshi ◽  
Jayakumaran Sivagnaname ◽  
Jente B. Kuang ◽  
Dhruva Acharyya ◽  
...  

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