Monte Carlo simulation of ion implantation into single-crystal silicon including new models for electronic stopping and cumulative damage
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1996 ◽
Vol 9
(1)
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pp. 49-58
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Keyword(s):
1995 ◽
pp. 214-217
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Keyword(s):
1992 ◽
Vol 39
(7)
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pp. 1614-1621
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1985 ◽
Vol 43
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pp. 300-301
2020 ◽
Vol 14
(6)
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pp. 1352-1357
1996 ◽
Vol 143
(11)
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pp. 3784-3790
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